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Address
C320, Shuye Times Square, Lane 1388, Laohumin Road, Minhang District, Shanghai
Nano China Co., Ltd
C320, Shuye Times Square, Lane 1388, Laohumin Road, Minhang District, Shanghai
Parylene Vacuum Coating Machine Parylene Coating SystemSpecially designed for laboratory applications, equipped with a built-in plasma source for material surface pretreatment, which can effectively improve membrane substrate bonding performance. Parylene coating is an ultra-thin polymer protective layer formed by chemical vapor deposition (CVD) process, which has the characteristics of molecular level uniform coverage, chemical inertness, excellent dielectric properties, and biocompatibility.

This model'sParylene Vacuum Coating Machine Parylene Coating SystemHas the following characteristics:
1. This modelParylene Coating SystemSuitable for both scientific research laboratories and production environments;
2. Specially optimize functions for the needs of small and medium-sized enterprises and R&D teams;
3. By configuring multiple optional components, the applicability and flexibility of the equipment can be further improved. The process chamber volume can be adjusted according to demand, with a minimum volume of 251 L;
4. The standard equipment configuration includes a plasma processing module;
5. Provide a cleanroom specific version for selection;
Typical applications of Parylene coating:
Motor protection: anti-corrosion and lubrication maintenance of micro motor windings and bearings, salt spray life increased by 10 times
Semiconductor packaging: chip level moisture-proof, three-dimensional structure protection of MEMS devices, and temporary coating of wafers
LED lighting: improves light extraction efficiency, heat dissipation performance, and weather resistance, extending lifespan to 70000 hours
Automotive electronics: ECU module protection, able to withstand temperature fluctuations of -40~150 ℃ and salt spray environment
Labcoat Series 300 Perrin Vacuum Coating Equipment:
| size |
L:1220mm W:1050mm H:1920mm |
| weight | 110kg |
| Cavity capacity | 25/35/40/80L |
| process chamber |
300mm Ø,H: 300mm (25 Liter) 300mm Ø,H: 350mm (35 Liter) 450mm Ø,H: 500mm (80 Liter |
| Plasma source |
2.45GHz,600 W |
| air circuit |
1 gas channel (gas distribution system with built-in process chamber), expandable up to 3 gas channels. |
| cooling system |
4L (electromechanical cold trap) |
| vacuum system |
DIN 40 ISO-KF |
| exhaust |
Electromagnetic exhaust valve |
| vacuum pump |
Extraction speed 50m ³/h |
| electrical connection |
Three phase five wire system, AC 50 Hz, voltage 400 V/240 V, maximum power consumption 8.5 kW |
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