- Phone
-
Address
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
Shanghai Nateng Instrument Co., Ltd
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
Park NX-HivacBy providing a high vacuum environment for failure analysis engineers, the measurement sensitivity and repeatability of atomic force microscopy measurements can be improved. Compared to general environments or dry conditionsN2Compared with other conditions, high vacuum measurement has the advantages of high accuracy, good repeatability, and low damage to the needle tip and sample. Therefore, users can measure many signal responses in various fault analysis applications, such as scanning diffusion resistance microscopy(SSRM)The concentration of dopants.Park NX-HivacMaterials science research that enables high-precision and high-resolution measurements in a vacuum environment is kept away from the influence of oxygen and other agents. Performing scanning diffusion resistance microscopy measurements under high vacuum conditions can reduce the need for needle tips-The sample interaction force significantly reduces damage to the sample and needle tip.

This can extend the service life of each needle tip, make scanning more cost-effective and convenient, and obtain more accurate results by improving spatial resolution and signal-to-noise ratio. Therefore, utilizingNX-HivacThe high vacuum scanning diffusion resistance microscopy measurement is a wise choice for fault analysis engineers to increase their throughput, reduce costs, and improve accuracy.
Basic technical parameters
scanner |
optical microscope |
sample stage |
|
XYScanner:50 μm xfiftyμ m100 (μm x 100μm |
Optional)objective lense: 10x |
5M pixelCCDXYPlatform itinerary :22 mm x 22mmSample size:50mm x 50mm |
, thickness |
20 mm |
Physical Information |
softwarehigh vacuum |
Vacuum chamber:300mm x 420mm x 320mmSmartScan: Park AFMOperating software XEI:AFMdata analysis software |
HivaManager-5 : Automatic vacuum control softwareVacuum level: less than1 x 1010-5 torrPump speed: |
5 min
Within reach
torrmajor functionHigh vacuum scanning for failure analysis applicationsPark NX-HivacAllow fault analysis engineers to use high vacuum2SSRM
Improved sensitivity and resolution. High vacuum scanning can provide better results than atmospheric or dry conditions
of
N
Under higher precision, better repeatability, and reduced needle tip and sample damage, users can measure a wider range of coating concentrations and signal intensities in failure analysis applications,
Advanced automation features2

The input operation required by users is simple, and users can scan faster to improve the laboratory's experimental results.application2 Research on the Electrical Properties of Two Dimensional Metal MaterialsC-AFM inAir vs High Vacuum MoS
Under air and vacuum conditions
MoS