Maskless lithography machine

NegotiableUpdate on 02/10

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Maskless Lithography Machine UV: A compact desktop maskless lithography system that uses digital micromirror technology for high-speed maskless pattern generation, achieving a minimum feature size of up to 0.5 μ m. Equipped with high-precision real-time focusing and visual alignment technology, it is mainly used for rapid prototype development in the fields of MEMS, photonic devices, quantum computing chips, and sensors.

Product Details

Digital Projection Maskless Lithography System-UVDCompact desktop maskless lithography system, using digital micromirror technology for high-speed maskless pattern generation, can achieve a minimum feature size of up to 0.5 μ m. Equipped with high-precision real-time focusing and visual alignment technology, it is mainly used for rapid prototype development in the fields of MEMS, photonic devices, quantum computing chips, and sensors.

Maskless lithography machine_UVDperformance parameters
Writing Head	50×	20×	10×	5×
Minimum feature size (μ m)	0.5	0.8	1	2.5
Roughness (3 σ, nm)	70	80	100	200
CD uniformity (3 σ, nm)	80	130	180	250
Engraving accuracy 100 × 100mm ² (nm)	500	500	800	1000
Write speed mm ²/min	13	50	100	180
System Features
light source	405nm, 385nm, or 365nm
Substrate size	Maximum 8 inches
Substrate thickness	0.1mm~8mm
Maximum exposure area	190×190mm²
temperature stability	±0.1°
gray level	1024
scalability	Support the expansion of dual wavelength light sources
Featured Features
Script based writing mode	Provide a scripting programming interface that supports user-defined machining structures
Online drawing processing mode	Support real-time online drawing, draw any shape directly on the real-time screen of the sample for processing
Engraving and slicing software	Supports multiple formats such as JPG, TIFF, GDS, DXF, etc
Real time autofocus	optical Zoom
Auto focus range	70μm
system accessories
objective lens	5×，10×，20×，50×，100×
system dimensions
length, width, height	850mm×940mm×780mm
	850mm×940mm×1470mm
weight	250KG (weight of the host)
Installation requirements
Electrical conditions	230VAC±5%，50/60Hz,10A
ambient temperature	Temperature: 21 ± 1 degrees Celsius, humidity: 50%~70%, no condensation
compressed air	6-9bar,±0.5bar
ambient lighting	yellow light
cleanliness level	Class 10000 cleanroom