Logosol edge and pre aligner edge inspection table optical instrument

Logosol edge and pre aligner edge inspection table optical instrument

Contact Manager Zhang: I872I868549

Logosol's enduring technology and high reliability standards are the foundation of its extensive series of pre aligners. The Prealigners product family supports processing objects within the range of 45mm to 480mm, regardless of their transparency from opaque to transparent. Logosol's unique integrated design and multifunctional control software enable it to achieve plug and play compatibility and interface with various semiconductor platforms.

📦2、 Main product series and models

LOGOSOL pre aligners are divided into three series according to application scenarios:

1. LOGOSOL Edge Grip series

• Technical Features：

• Passive edge contact technology,Zero mechanical stressTo avoid damage to the wafer.

• Support transparency fromFrom opaque to fully transparentThe wafer1.

• Applicable size75mm -300mm wafers.

• Typical model：
  LPA6EH-3,LPA8EH-3,LPA68EH-3,LPA8ET-3,LPA12ET-3,LPA812EH-3.

• Application scenariosA compound semiconductor production line with high cleanliness requirements for silicon carbide/gallium nitride wafer manufacturing.

2. LOGOSOL standalone series

• Technical Features：

• Single machine processingSquare, double-layer substrates, and circular wafersSupports a large size range of 45mm to 480mm.

• No need for mechanical repositioning, switch sizes through software to improve flexible production efficiency.

• LOGOSOL Typical Models：
  LPA26-3,LPA38-3,LPA58-3,LPA312-3,LPA812-3,LPA1218-3.

• Application scenariosR&D laboratory, multi size wafer trial production line, photovoltaic substrate positioning.

3. LOGOSOL Embedded Series

Logosol edge and pre aligner edge inspection table optical instrument

• Technical Features：

• Specially optimized for high-speed wafer transfer systems, with low-cost integrated center computing and angle positioning functions.

• Provide high-precision options and customized fixture sizes, compatible with mainstream industrial robots.

• LOGOSOL Typical Models：
  LPA25-1E,LPA38-1E,LPA58-1E,LPA312-1E,LPA812-1E,LPA1218-1E.

• Application scenariosTransformation of semiconductor measurement equipment (such as Hitachi CD-SEM) and automated wafer handling system

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