- Phone
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Address
No. 5500 Yuanjiang Road, Minhang District, Shanghai
Shanghai Maikewei Semiconductor Technology Co., Ltd
No. 5500 Yuanjiang Road, Minhang District, Shanghai
Main features:
√ Temperature range: 4.3 K~475 K
√ Optional low temperature 1.9 K/1.6 K
√ Standard 2-inch (51 mm) sample, 4-inch (102 mm) customizable
√ The sample can rotate ± 5 ° within the plane
√ Sample vibration<30 nm optional
√ Ultra high vacuum option
√ Customizable vacuum chamber for transferring samples, avoiding exposure of samples to atmospheric environment
√ Ring magnet option with a maximum capacity of 0.19T
Equipment parameters:
temperature range
Install up to 6 probe armsBasic temperature 4.3 K, control range 4.4 K~475 K
Install PS-LT low-temperature optionBasic temperature 1.9 K, control range 2 K~475 K
Install PS-VLT-CPX ultra-low temperature optionBasic temperature 1.6 K, control range 1.65 K~400 K
Install PS-LL-CPX option (Load Lock)Basic temperature 10 K, control range 10 K~400 K
temperature stabilityLiquid heliumliquid nitrogen
Basic temperature (without heating control)±15 mK±20 mK
<10 K±50 mK
10 K ~ 100 K±20 mK±50 mK
101 K ~ 250 K±15 mK±50 mK
251 K ~ 350 K±15 mK±100 mK
351 K ~ 675 K±50 mK±100 mK
vacuumUsing TPS-FRG molecular pump group as the standardPS-HV-CPX high vacuum option
vacuum pumping time30 min (<1 × 10-3 Torr)10 min (<1 × 10-3 Torr)
room temperature<5 × 10-4 Torr<5 × 10-6 Torr
Basal temperature<1 × 10-5 Torr<5 × 10-7 Torr
maximum temperature<1 × 10-5 Torr<5 × 10-7 Torr
cycle time
Total cycle3 h
evacuate0.5 h
Probe station cooling1.25 h
Probe station temperature rise2 h
Load Lock sample replacement time1 hour (with PS-LL-CPX option)
sample
Maximum size51 mm (2 inches) standard
25.4 mm (1 inch) installation of PS-VLT-CPX high vacuum option
25.4 mm (1 inch) installation of PS-LL-CPX Load Lock option
Sample backlight interfaceNot selectable
Sample rotation± 5 ° in-plane rotation
Sample vibration<300 nm standard,<30 nm equipped with PS-PVIS shock absorption option
Probe configuration
Maximum number of probes6
Probe arm thermometerUsed to monitor the temperature of the probe arm
Cooling probe bracket<20 K (sample at base temperature)
Probe bracketConnect the sample stage or 4K anti radiation screen heat sink
Probe arm bracketConnect the anti radiation screen heat sink
DC/RF probeElectrical insulation>100G Ω for low leakage current measurement
Microwave probeFrequency range from DC to 67GHz
Fiber optic probeCan be used for electro-optical measurement
Needle drop rangeAll probes can be inserted into a circle with a diameter of 25.4 millimeters (1 inch)