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Address
No. 5500 Yuanjiang Road, Minhang District, Shanghai
Shanghai Maikewei Semiconductor Technology Co., Ltd
No. 5500 Yuanjiang Road, Minhang District, Shanghai
Lake Shore's CRX-VF is a probe station without liquid helium closed-loop refrigeration, which adds a ± 2.5T superconducting magnet and can perform C-V, I-V, microwave, and electro-optic detection, as well as out of plane vertical field superconducting magnetic measurements. Researchers can use CRX-VF for Hall effect measurement and testing of magnetic transport parameters. CRX-VF can achieve true performance on wafers with a diameter of up to 51 millimeters (2 inches)90 ° wafer detectionThe sample can maintain a high temperature during the cooling process, reducing the possibility of sample condensation, which is a key requirement for measuring organic materials.
CRX-VF can operate within a temperature range of 10 K to 500 K, using an independent closed-loop refrigeration system that can cool to low temperatures without human assistance after startup. This system provides a complete solution for users seeking to balance the convenience of operating without liquid helium and the reliable measurement performance of Lake Shore products.
Main features:
√ Temperature range 10 K~500 K
√ Vertical magnetic field ± 2.5 T, customizable magnetic field above 3T
√ Maximum 2-inch (51 mm) sample
√ 90 ° probe sample measurement
√ Hall Effect Test Options
√ Ultra high vacuum option
√ Customizable vacuum chamber for transferring samples, avoiding exposure of samples to atmospheric environment
Equipment parameters:
| magnetic field | ||
| Magnet type | Superconducting solenoid | |
| direction of magnetic field | Vertical direction (perpendicular to the sample surface) | |
| Magnetic field control | current control | |
| Magnetic field size | Maximum ± 25 KOe (± 2.5 T) | |
| Magnetic field uniformity | 0.5% 10mm diameter; 1% 25 mm diameter | |
| Probe tip movement | <5 μ m throughout the entire magnetic field range | |
| temperature range | ||
| ±2.5 T | Temperature 10 K | |
| ±2 T | Temperature range 11 K~400 K | |
| ±1 T | Temperature range 401 K~500 K | |
| The above temperature range is effective when installing up to 6 probe arms | ||
| temperature stability | ||
| Basic temperature (without heating control) | not specified | |
| <10 K | ±50 mK | |
| 10 K ~ 500 K | ±10 mK | |
| vacuum | Using TPS-FRG molecular pump as the standard | PS-HV-CPX high vacuum option |
| vacuum pumping time | 90 min (<1 × 10-3Back) | 30 min (<1 × 10-3 Back) |
| at room temperature | <5 × 10-4Back | <5 × 10-6Back |
| At basic temperature | <1 × 10-5Back | <5 × 10-7Back |
| At the highest temperature | <5 × 10-5Back | <5 × 10-7Back |
| cycle time | ||
| Total cycle | 8.5 h | |
| evacuate | 1.5 h | |
| Probe station cooling | 5 h | |
| Probe station temperature rise | 2 h | |
| sample | ||
| Maximum size | 51 mm (2 inches) | |
| Sample backlight interface | Not selectable | |
| Sample rotation | Not selectable | |
| Sample vibration | <1 μm | |
| Probe configuration | ||
| Maximum number of probes | 6 | |
| Probe arm thermometer | Used to monitor the temperature of the probe arm | |
| Cooling probe bracket | < 50 K (sample at base temperature) | |
| Probe bracket | Connect the anti radiation screen heat sink | |
| Probe arm bracket | Connect the anti radiation screen heat sink | |
| DC/RF probe | Electrical insulation>100G Ω for low leakage current measurement | |
| Microwave probe | Frequency range from DC to 67GHz | |
| Fiber optic probe | Can be used for electro-optical measurement | |
| Needle drop range | All probes can be inserted into a circle with a diameter of 25.4 millimeters (1 inch) | |