JEOL Schottky field emission scanning electron microscope IT800

NegotiableUpdate on 05/07

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Overview

The JEOL Schottky field emission scanning electron microscope IT800 $r $n semi immersed objective refers to a strong magnetic field lens formed by a leakage magnetic field at the lower part of the usual objective. JEOL's semi immersed objective lens can improve the focusing ability of electron beams and achieve ultra-high resolution. And it can also more efficiently collect low-energy secondary electrons excited from the sample, improving the detection efficiency of the UID detector.

Product Details

JEOL Schottky field emission scanning electron microscope IT800Product Introduction

日本电子JEOL肖特基场发射扫描电镜IT800

1JEOL Schottky field emission scanning electron microscope IT800High resolution imaging capability

The JSM-IT800 adopts an immersed Schottky Plus field emission electron gun, combined with a low aberration condenser lens and Neo Engine electron optical control system, to achieve nanometer level resolution. The secondary electron image resolution can reach 0.5nm at an acceleration voltage of 15kV, and even at a low voltage of 1kV, it maintains a high resolution of 0.7nm. This characteristic gives it significant advantages in observing the microstructure of nanomaterials, semiconductor devices, and other materials, such as clearly displaying the distribution of catalyst particles smaller than 10nm.

2、 Flexible modular design

Multiple objective lens options: Five objective lens modules are available, including universal hybrid lenses (HL), high-resolution super hybrid lenses (SHL/SHLs), and semi immersion objectives (i/is) specifically designed for semiconductors, meeting diverse analysis needs from magnetic materials to insulators.

Scalable detector system: equipped with a new scintillation backscatter detector (SBED) and a multifunctional backscatter detector (VBED), SBED can still capture clear component contrast images at low voltage, while VBED supports synchronous acquisition of 3D morphology and component information, suitable for multi-dimensional analysis of complex samples.

3、 Intelligent operation and efficient analysis

Integrated control platform: Seamless integration of energy dispersive X-ray spectrometer (EDS) through SEM Center graphical interface, achieving seamless switching between real-time component analysis and image display, and improving analysis efficiency.

AI assisted function: Introducing LIVE-AI filters to optimize real-time image quality, supporting fast focusing and astigmatism adjustment; Optional software such as Smile Navi provides operation navigation for beginners, reducing the threshold for use.

Automated adjustment: Equipped with functions such as automatic axis alignment, focusing, and anti astigmatism, combined with a five axis motor-driven sample stage (supporting 360 ° rotation and tilt), simplifying complex operation processes.

4、 Wide applicability and industrial compatibility

JSM-IT800 has shown remarkable performance in fields such as nanotechnology, semiconductors, materials science, and biomedical research. For example, its Super Hybrid Lens (SHL) can efficiently analyze magnetic materials without switching modes; The semi immersed objective lens (i/is) excels in cross-sectional fault analysis of semiconductor devices. In addition, the device supports high-resolution imaging under high beam conditions (such as 100nA@5kV ）Combined with high-speed elemental surface analysis and EBSD (electron backscatter diffraction) function, it meets the rapid detection needs of industrial quality inspection.