Intermittent CVD rotary furnace

NegotiableUpdate on 12/28

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

The intermittent CVD rotary furnace consists of a control cabinet and a heating furnace. The control cabinet is a sealed shell with a built-in circuit board and gas circuit board. The circuit and gas circuit can be controlled externally through a touch screen and manual valve; The heating furnace consists of a three zone open tube furnace and corresponding accessories, and the furnace tubes can rotate.

Product Details

1. This device consists of a control cabinet and a heating furnace. The control cabinet is a sealed shell with built-in circuit board and gas circuit board. The circuit and gas circuit can be controlled externally through a touch screen and manual valve; The heating furnace consists of a three temperature zone open tube furnace and corresponding accessories, and the furnace tubes can rotate;

2. The left flange of the heating furnace is the inlet end, which is composed of a shut-off valve and CCR joint. The flange is equipped with an automatic pressure relief device (sensor+solenoid valve); The right flange is the exhaust end, which is composed of a ball valve and VRR joint. The suction port is composed of a manual baffle valve and an explosion-proof variable frequency vacuum pump; The furnace tube is equipped with a blocking component to prevent the loss of experimental materials. The air interface of the entire equipment is VCR1/4 interface.

rated voltage	380V
power	13KW
Operating temperature	500-1000℃
Furnace tube size	Metal tube with dimensions of 80mm, 150mm, and 1700mm (both ends * middle * total length)
heating element	resistance wire
Heating zone length	300mm300300
Furnace tube rotation speed	0-7rpm
thermocouple type	Type K thermocouple
mass flow meter	0-2L/Min D07-19B（4 路）
float flow meter	2-20L/min gas
Device dimensions	Control cabinet: length 1132mm x width 1000mm x height 1900mm; Heating furnace: length 2500mm x width 630mm x height 1300mm
Total equipment weight	700KG