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E-mail
ahbeq888@163.com
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Phone
17305697718
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Address
Beike Feixi Base, No. 6 Yixiu Road, Hefei City, Anhui Province
Product Categories
Anhui Beike Equipment Technology Co., Ltd
Intelligent PECVD system
NegotiableUpdate on 12/28
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Overview
PECVD-III-500A-D210 is an intelligent PECVD system. The equipment is mainly divided into four parts: multi temperature zone tube furnace, RF components, gas path system, and automation control software integration system.
Product Details
The equipment is mainly divided into four parts: multi temperature zone tube furnace, RF components, gas path system, and automation control software integration system.
1. Open type heating furnace
The heating furnace is made of ultra light alumina fiber material, equipped with K-type thermocouple and 6-point temperature control; The temperature control of the equipment is flexible, and the heating furnace can be electrically turned on, making it convenient for customers to replace and repair the reaction tube.
2. Pneumatic system
The mass flow meter can accurately control the mixing ratio of multiple gases according to different flow rates, and in addition, a separate gas passes through the bubbler and enters the reaction tube.
3. RF components
1000W high-performance RF glow uniformity can keep the entire reaction chamber in the glow generation zone.
4. Intelligent control system
Adopting intelligent PID fuzzy control and 30 segment programmable control. Equipped with super mild and thermocouple breaking alarm function.
maximum temperature |
1200℃ |
Continuous operating temperature |
≤1100℃ |
heating rate |
≤10℃/min |
temperature control accuracy |
±1℃ |
heating element |
resistance wire |
thermocouple |
K-type |
Temperature control method |
Fuzzy PID control and self-tuning adjustment, artificial intelligence 30 segment programmable control, with super temperature and breaking alarm function, human-machine interface with PLC control, 15 inch LCD screen control, digital industrial control instrument dual control, using industrial intelligent temperature controller and software to achieve dual control |
Heating total power |
≤15KW |
Heating zone size |
300+300+300mm |
RF power |
1000W |
Device dimensions |
2550*850*1600mm |
Equipment weight |
About 600KG |
