The industrial atomic force microscope (FM Nanoview LS-AFM) has almost unlimited sample size and weight, making it particularly suitable for detecting large samples such as wafers, ultra large gratings, and optical glasses.
Product Features:
◆Realize large-scale commercial productionIndustrial atomic force microscope
The sample size and weight are almost unlimited, making it particularly suitable for testing large samples such as wafers, ultra large gratings, and optical glass
The sample stage has strong expandability and is very convenient for multi instrument combination to achieve in-situ detection
One click automatic scanning, programmable multiple testing points for fast and automated detection
When scanning the image, the sample remains stationary and the probe is drivenXYZ 3D Mobile Measurement Imaging
◆ Longmen style scanning head design, marble base, vacuum adsorption stage
Integrated mechanical vibration damping and environmental noise shielding solution, greatly reducing system noise levels
Intelligent and fast needle insertion method for automatic detection of pressurized ceramics by motor control, protecting probes and samples
◆ Scanner non-linear correction user editor, nano characterization and measurement accuracy superior to98%
Technical Specifications:
working mode |
Contact mode, tap mode |
Zlifting platform |
Stepper motor drive control, minimum step size10nm |
Optional mode |
friction/Lateral force, amplitude/phase, magnetic/electrostatic force |
Zliftitinerary |
20mm (optional 25mm) |
Force spectrum curve |
F-Z force curve, RMS-Z curve |
Optical positioning |
10X optical objective lens |
XYZscanning method |
Probe drivenXYZ Scan |
camera |
5-megapixel digital CMOS |
XYscanning range |
greater than100um×100um |
scan rate |
0.6Hz~30Hz |
Zscanning range |
greater than10um |
Scanning angle |
0~360° |
Scanning resolution |
horizontal0.2nm, Vertical 0.05nm |
runtime environment |
Windows 10 operating system |
XYSample stand |
Stepper motor drive control, movement accuracy1um |
communication interface |
USB2.0/3.0 |
XYmobile itinerary |
200 × 200mm (optional 300 × 300mm) |
instrumentstructure |
Longmen style scanning head, marble base |
Sample stage |
diameter200mm (optional 300mm) |
Shock absorption method |
Air floating shock absorber+Soundproof shielding cover (optional active shock absorber platform) |
sample weight |
≤20Kg |
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