High sensitivity silica concentration meter

SLIA-300High sensitivity silica concentration meter

Meet the customer's demand for measuring ultra-low density silica with high sensitivity of 0.01 µ g/L (0.01 ppb)

The ultrapure water used in semiconductor production processes can be further purified by using ion exchange resins. Rapid capture of dissolved silica from ion exchange resins can control the quality of ultrapure water, which is crucial for the manufacturing process.

HORIBA Advanced Techno has developed and adopted a new "long optical path length measurement unit" that can perform high-sensitivity measurements on ultra-low density silica, while also providing a compact desktop model to improve practicality.

This product has a series of standard functions such as self diagnosis, as well as new performance improvements such as high-speed response and high sensitivity, providing stronger support for pure water processes in semiconductor production processes

● High sensitivity and high repeatability

The application of fiber optic technology ensures a long optical path of approximately 1 meter, achieving ultra low density and high sensitivity response. This product can ensure a 5-minute high-speed measurement process and achieve a repeatability accuracy of ± 2% F.S. within the measurement range of 0-2 µ g/L.

Desktop model with compact design

The flexible structure of the "Long Light Path Length Measurement Unit" has also achieved revolutionary compact design. This desktop model is suitable for various installation conditions, including narrow spaces.

Reduce reagent consumption to 1/5

In order to reduce reagent consumption to 1/5 of the previous level, the reaction unit has been improved and separated from the measuring cell. In addition, the measuring unit has been changed to a pipeline type. The use of a "long optical path length measurement unit" can significantly reduce the operating cost of reagents.

Reduce reagent consumption by more than half

Not only does it reduce the consumption of reagents, but it also reduces the consumption of sample water. By using a 'long optical path length measurement unit', the consumption of expensive pure water (used as sample water) has been reduced by 60%. HORIBA Advanced Techno's silica concentration meter helps reduce on-site operating costs.

● Self diagnostic function for concentration meter misoperation

Perform self diagnosis for erroneous operations, such as sample water and/or reagent injection, calibration errors, temperature detection within the unit, and light source errors. When an error is detected, the warning light lights up and displays a text message.

Automatic calibration achieves excellent maintainability

Continuously perform zero point calibration to check transmitted light and correct turbidity.

● Allow up to six measurement points (optional)

Up to six measurement points can be set. A single unit can perform multi-point measurements.

● Using light source: no need to replace

Using a monochromatic semiconductor light source to provide stable light output and longer lifespan. Can be used as a light source.

Long light path length measurement unit: capable of detecting as low as 0.01 µ g/L

The measuring unit is a double-layer structure, in which a transparent fluorocarbon resin tube passes through a stainless steel tube. Due to the refractive index difference between the fluorocarbon tube and the surrounding air, light entering from one side of the tube is repeatedly reflected in the tube before reaching the other side.

This optical transmission mechanism is the application of fiber optic efficiency and low blocking principle, achieving higher detection sensitivity and high repeatability.

This long light path measurement unit adopts a flexible pipeline structure and is compact in size. By storing a 1-meter-long unit in a compact desktop body, the unit size has been successfully reduced to 1/8 of the previous generation model.

In addition, the pipeline structure of the measurement unit can effectively reduce operating costs: the consumption of color reagent and sample water is reduced to 1/5 and 1/2 of the previous amount, respectively.

SLIA-300High sensitivity silica concentration meterspecification