High precision element composition detector for semiconductor materials

High precision element composition detector for semiconductor materials

Core testing technology and instruments

1. Inductively Coupled Plasma Optical Emission Spectrometer (ICP-OES)

• Instruments used in the laboratory（ICP-OES)detailedIntroduction：

• instrumentPerformance characteristics:

• 1High degree of instrument automation

• The degree of automation of the instrumenttallExcept for the power switch, all operations are completed by software. Intelligent software that can provide real-time feedback and information prompts for various operations.

• 2Safe and reliable solid-state RF power supply

• The RF power supply used in the instrument has small size, high output efficiency, stable output power, and various safety protection functions such as water, gas, and overload, greatly improving the safety of the instrument and reducing its failure rate.

• 3. Fully automatic ignition and matching technology

• The software can automatically ignite with one click, and all parameter settings changes are automatically completed. Combined with automatic matching technology, the ignition success rate is high and the operation is simple.

• 4. Intelligent flame monitoring function

• The instrument is configured with sensitivitytallThe fiber optic sensor can monitor the working condition of the flame in real-time while the instrument is in operation. In case of abnormal flameout, the instrument can automatically shut down.

• 5. Ultra high resolution optical path system

• The instrument is equipped with ultra-high resolution4320 imported grating with engraved lines, matched with*The optical path adjustment technology reduces the resolution of ordinary instruments to aboutThe resolution is reduced from 0.008nm to within 0.005nm, and the ultra-high resolution ensures that there is no mutual interference between the test elements.

• 6precisiontallThe constant temperature system

• The overall optical path of the instrument is protected by a precision constant temperature system, and the temperature control can be set in real time according to the actual environmental temperature of the customer's laboratory, without the need for long-term continuous adjustment. The temperature control accuracy is high≤± 0, 1 ℃, the precise constant temperature system ensures the stability of the optical path, and the test data is more stable.

• 7. High precision airflow control system

• High precision mass flow controllers are used for plasma gas, auxiliary gas, and carrier gas in instrument operation（MFC is used for control, with continuously adjustable flow rate and high accuracy in outputting airflow, ensuring the accuracy of test data.

• 8Peristaltic pump injection device

• The instrument is equipped with a high-precision peristaltic pump with twelve rollers, which can ensure the accuracy of sample injection and prevent liquid accumulation at the same time. The rotational speed of the peristaltic pump is continuously adjustable to meet various testing requirements of customers.

• 9. Automatic adjustment of observation position

• The instrument adopts a two-dimensional mobile platform design, which can adjust the position of the torch tube in real time through software. The optimized observation position can be found through feedback signal values to obtain strong sensitivity and accurate testing results.

• 10. Ultra low usage cost

• When the instrument is not in operation, the power supply, cooling water tank, and gas are all turned off without any cost. The instrument can be used immediately without the need for prolonged preheating of the optical path. The purity of argon gas used is99, 99*%Okay, no need for high-purity argon at 99% or 999%, cost savings of at least one-third.

• 11. Sensitivitytallthe detector

• The instrument is equipped with highly sensitive imported photomultiplier tubes（PMT, as a detector, can automatically set test parameters for different test elements to achieve ideal detection states and provide accurate test results. No need for refrigeration, no need for blowing, long service life.

• ICP-OESinstrumentTechnical Specifications:

• 1. Input power supply: voltage AC 220V, current 20A.

• 2adoptCzerny Turner type optical path with a focal length of 1000mm.

• 3. Ion etched holographic grating with a engraved area of (80 × 110) mm.

• 4Fully automatic one key ignition, automatic matching, stable and convenient ignition.

• 5. Using a concentric circle atomizer with a swirl chamber, the 1ppmMn intensity is greater than 1000000 CPS.

• 6. Resolution (Mn257, 610nm): ≤ 0, 005nm (4320 line grating); ≤ 0, 008nm (3600 line grating); ≤ 0, 015nm (2400 line grating).

• 7. Wavelength range: 190-460nm (4320 line grating); 190-500nm (3600 line grating); 190-800nm (2400 line grating)

• 8. Independently developed all solid state RF power supply, with output power of 800-1600W, continuously adjustable, power efficiency greater than 65%, operating frequency of 27,12MHz, frequency stability<0.05%, power output stability<0.05%.

2. X-ray Fluorescence Spectrometer (XRF)

• Rapid screening of metal contaminants on the surface of silicon wafers.

• Purity verification of quartz crucible.

• Low sensitivity to light elements such as H, He, Li, Be (detection limit>0.1%).

• The quantitative accuracy is affected by matrix effects (relative error of about 1% -5%).

• Non destructive testingThe sample does not require dissolution or grinding and can be directly analyzed for solids, powders, and liquids.

• wide detection rangeCan analyze the vast majority of elements from sodium (Na) to uranium (U).

• Quick screeningThe detection time only takes a few seconds to a few minutes, suitable for batch testing on production lines.

• Wavelength Dispersive Type (WDXRF)High resolution, suitable for high-precision quantitative analysis.

• Energy Dispersive Type (EDXRF)Fast and portable, suitable for on-site analysis.

• principleIlluminate the sample with X-rays, excite characteristic fluorescent X-rays, and determine the type and content of elements by detecting wavelength and intensity.

• classification：

• advantage：

• 局限性：

• Application scenarios：

• Application scenarios：

High precision element composition detector for semiconductor materials