Helios 5 PFIB DualBeam

NegotiableUpdate on 01/31

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Overview

Helios 5 PFIB DualBeam $r $n can achieve high-quality, gallium free TEM and APT sample preparation due to the excellent performance of the new PFIB chromatography column under all operating conditions, which can achieve 500 V Xe+final polishing.

Product Details

Plasma focused ion beam scanning electron microscope for TEM sample preparation (including 3D characterization, cross-sectional imaging, and microfabrication)

The Thermo Scientific Helios 5 Plasma FIB (PFIB) DualBeam (Focused Ion Beam Scanning Electron Microscope or FIB-SEM) is a microscope designed specifically for materials science and semiconductor applications. Materials science researchers can useHelios 5 PFIB DualBeamRealize large volume 3D characterization, gallium free sample preparation, and precise microfabrication. Manufacturers of semiconductor equipment, advanced packaging technology, and display devicesHelios 5 PFIB DualBeamIt can achieve non-destructive, large-area reverse processing, rapid sample preparation, and high fidelity fault analysis.

The main characteristics of materials science

Preparation of Gallium free STEM and TEM Samples

Due to its ability to achieve 500 V Xe+final polishing and excellent performance under all operating conditions, the new PFIB chromatographic column enables high-quality, gallium free TEM and APT sample preparation.

New generation 2.5 μ A Xenon plasma FIB chromatography column

Utilizing the next-generation 2.5 μ A Xenon plasma FIB chromatography column (PFIB) to achieve high-throughput and high-quality statistical 3D characterization, cross-sectional imaging, and microfabrication.

Sub nanometer performance at low energy

With the Elstar electron chromatography column equipped with high current UC+monochromator technology, sub nanometer performance can be achieved at low energy to display the most detailed information.

Advanced features

The electronic and ion beam induced deposition and etching functions are achieved through the FIB/SEM system using the optional Thermo Scientific MultiChem or GIS gas transport system.

Obtaining nanoscale information in a short period of time

With SmartAlign and FLASH technology, users of any level of experience can obtain nanoscale information in the shortest possible time.

Advanced automation

Use the optional AutoTEM 5 software to achieve multi-point automation as quickly and efficiently as possiblein situandnon-in situTEM sample preparation and cross-sectional imaging.

Multi modal subsurface and 3D information

Use the optional Auto Slice&View 4 (AS&V4) software to access high-quality, multi-mode subsurface and 3D information and accurately locate areas of interest.

Complete sample information

Clear, accurate, and charge free contrast of the most complete sample information can be obtained through up to six integrated detectors integrated within the chromatographic column and under the lens.

Artifact free imaging

Non artifact imaging is based on integrated sample cleanliness management and dedicated imaging modes, such as SmartScan ™ And DCFI mode.

Accurate sample navigation

Due to the high stability and accuracy of the 150mm piezoelectric stage and optional chamber Nav Cam navigation, precise sample navigation can be customized according to specific application requirements.

Material Science Specifications

Helios 5 PFIB CXe DualBeam	Helios 5 PFIB UXe DualBeam
Electronic optical system	Elstar ultra-high resolution field emission SEM chromatographic column, equipped with: Immersion magnetic objective lens High stability Schottky field emission gun that can provide stable high-resolution analysis current UC+Monochromator Technology
electronBeam resolution	At the optimized working distance (WD): 1 kV 时 0.7 nm 500 V (ICD) 时 1.0 nm At the coincidence point: 15 kV 时 0.6 nm 1 kV 时 1.2 nm
Electron beam parameter space	Electron beam current range: 0.8 pA to 100 nA Acceleration voltage range: 200 V-30 kV Landing energy range: 20 * eV – 30 keV Maximum horizontal field width: 2.3 mm at 4 mm WD
Ionic optical system	High performance PFIB chromatography column with inductively coupled Xe+plasma (ICP) Ion beam current range: 1.5 pA to 2.5 µ A Acceleration voltage range: 500 V -30 kV Maximum horizontal field width: 0.9 mm at the plasma beam coincidence point Ion beam resolution at coincidence point Using statistical methods at 20 nm at 30 kV When using the selection angle method at 30 kV, it is 10 nm
detector	Elstar tube SE/BSE detector (TLD-SE, TLD-BSE) Elstar Column SE/BSE Detector (ICD)* Everhart Thornley SE detector (ETD) View the IR camera of the sample/chromatographic column High performance ion conversion and electron (ICE) detector for secondary ions (SI) and secondary electrons (SE) Indoor Nav Cam sample navigation camera* Scalable, low voltage, high contrast, directional, solid-state backscattered electron detector (DBS)* Integrated plasma beam current measurement
Stage and sample	Flexible 5-axis electric platform: XY range: 110 mm Z range: 65 mm Rotation: 360 ° (infinite) Tilt range: -38 ° to+90 ° XY repeatability: 3 μ m Maximum sample height: 85mm from the centroid Maximum sample weight at 0 ° tilt: 5 kg (including sample holder) Maximum sample size: 110 mm when rotated (larger samples are also possible, but rotation is limited) Calculate center rotation and tilt	High precision, 5-axis electric sample stage (with XYR axes), piezoelectric drive XY range: 150 mm Z range: 10 mm Rotation: 360 ° (infinite) Tilt range: -38 ° to+60 ° XY repeatability: 1 μ m Maximum sample height: 55 mm from the centroid Maximum sample weight at 0 ° tilt: 500 g (including sample holder) Maximum sample size: 150 mm when rotated (larger samples are also possible, but rotation is limited) Calculate center rotation and tilt

Specifications