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Ningbo Ruike Micro Intelligent Technology Co., Ltd
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Ningbo Ruike Micro Intelligent Technology Co., Ltd

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    8th Floor, Building 14, Jinshan Zhiyuan Garden, No. 199, Lane 520, Tongning Road, Qianjiang Street, Jiangbei District, Ningbo

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Fully automatic four probe tester

NegotiableUpdate on 05/06
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Overview

The fully automatic four point probe tester adopts the four point probe method and ASTM standards, and is equipped with a fully automated measurement system, which can accurately measure resistivity, block resistance, and material thickness. Equipped with professional PC software, it supports data acquisition, 2D/3D spectrum generation, and report export. The probe pressure and testing mode can be flexibly adjusted, suitable for testing needs in fields such as semiconductors, nanomaterials, and electronic devices.

Product Details

1、 Product Overview

ROOKO Micro FT-3110Fully automatic four probe testerIt is a precision instrument designed specifically for material resistance detection, integrating measurement technology and intelligent operation functions to provide stable and reliable detection solutions for scientific research experiments and industrial production. The instrument uses tungsten steel probes with a mechanical drift rate of ≤ 0.3% to ensure the accuracy and repeatability of test data.

2、 Core functions

  1. Measurement parameters: It can simultaneously detect key indicators such as resistivity, block resistance, and material thickness, meeting multi-dimensional detection needs.

  2. Automated operation: Supports automatic positive/negative current output and voltage measurement, compatible with multiple testing modes such as single point, five point, and surface scan, and the number of testing points can be freely set.

  3. Data processing: Professional V4.0 analysis software can achieve data collection, statistical analysis, unit conversion, generate 2D/3D scanning spectra and detailed test reports, and support data export and printing.

  4. Flexible adaptation: The probe pressure can be adjusted within a range of 100-500g, and the stage supports 2-12 inch circular wafers and customized 153mm × 153mm square wafers, suitable for different specifications of samples.

  5. Safety protection: equipped with limit range protection, pressure protection, emergency stop function, and abnormal alarm to ensure operational safety and equipment stability.

3、 Technical parameters

Specification project technical indicators
sheet resistance 10^-5~2×10^5Ω/ □ (FT-3110A); 10^-6~2×10^5Ω/ □ (FT-3110B)
resistivity 10^-5~2×10^5Ω-cm(FT-3110A); 10^-6~2×10^5Ω-cm(FT-3110B)
test current 0.1μA-100mA(FT-3110A); 0.1μA-1A(FT-3110B)
resistance accuracy ≤ 0.3% (standard resistance)
Single point repeatability ≤0.5%
Power parameters AC 220V ± 10%, 50Hz, power consumption < 600W

4、 Applicable fields

  • Semiconductor materials: wafers, semiconductor substrates, selective emitter diffusion sheets, electroplated copper resistors, etc;

  • New materials: ferroelectric materials, nanomaterials, amorphous/microcrystalline silicon materials, etc;

  • Electronic components: solar cells LCD、OLED、 Touch screen, etc;

  • Research and Production: Material Analysis in University Laboratories and Research Institutes, Quality Testing in Electronic Manufacturing Industry.

5、 Configuration List

  • Standard configuration: 1 host, 1 set of testing lines, 1 linear four probe probe, 1 set of gold-plated spring copper needle and 1 set of spring tungsten needle, 1 set of analysis software, and 1 measurement certificate;

  • Optional accessories: 2-12-inch wafer sample stage, customized probe specifications, computer+printer, 1-3 year extended warranty service.

6、 Product advantages

ROOKO Micro FT-3110 Fully Automatic Four Probe TesterWith wide range measurement, high-precision data, intelligent operation, and wide adaptability, it has become the preferred equipment in the field of material resistance detection. The instrument undergoes strict quality testing and provides a 13% value-added tax special invoice, coupled with professional technical support and after-sales service, to ensure the stable operation of the equipment throughout the process.