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Shenzhen Angwei Electronics Co., Ltd

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Fourier transform infrared spectrometer

NegotiableUpdate on 07/07
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Overview

The MG 6030 Fourier Transform Infrared Spectrometer is a multi gas spectrometer based on Fourier Transform Infrared spectroscopy. It has sensitivity from ppb to ppm. Widely used for semiconductor production process control and monitoring, gas purity and composition analysis, environmental toxic and harmful gas monitoring, and industrial exhaust gas monitoring. The MG 6030 Fourier Transform Infrared Spectrometer can analyze airflows containing up to 40% water and can simultaneously analyze and display up to 30 gases.

Product Details

Fourier transform infrared spectrometerMG6030

MG 6030Fourier transform infrared spectrometerIt is a multi gas spectrometer based on Fourier transform infrared spectroscopy. It hasppbtoppmSensitivity. Widely used for semiconductor production process control and monitoring, gas purity and composition analysis, environmental toxic and harmful gas monitoring, and industrial exhaust gas monitoring. MG 6030Fourier transform infrared spectrometerCan analyze up to40%The airflow of water can simultaneously analyze and display up to30Gas species. The analyzer stores calibration spectra, thus saving the cost of the gas cylinder. In addition, the operator will also notice the MG 6030Fourier transform infrared spectrometerEasy to operate and maintain.

MG 6030Fourier transform infrared spectrometerfrom2102Fourier transform infrared spectrometer, high-throughput sampling unit, professional analysis software, and independent quantitative spectral library. MG 6030 collects high-resolution infrared spectra and quantitative spectral library analysis, providing high-precision and high-sensitivity measurements for the vast majority of gases and water vapor.


Application fields:

Chimney monitor

Process monitoring improvement and optimization

Air environment analysis

Gas purity analysis

Combustion emission monitoring

Monitoring of Selective Silicon Rectification Catalytic Reduction Performance

Features and advantages:

10 ppb~100% sensitivity for the vast majority of toxic and harmful gases

● Easy to move from one place to another, set up in just a few minutes

● Simultaneously analyze and display up to30Gas species

The analyzer stores calibration spectra, eliminating the cost of gas cylinders

The sampled gas is heated and maintained at a constant temperature before entering the analysis chamber

Linear detector ensures that all analyzers are maintained under the same calibration conditions

Frequency and resolution diagnosis to ensure constant calibration

Provide automatic temperature and pressure compensation to ensure analysis accuracy

● User friendly software interface, can be operated with a little training


Analyzer Mastermachine

MG6030Testing techniquestechnique FourierTransform infrared lightscore

Can test gases or water vapor The vast majority of molecules, except for nitrogen, oxygen, and hydrogen

scope Concentration ranging from 10 ppb to 100%

Fu LiLeaf Transformation Redoutside 2102 madeFu LiLeaf Transformation Redoutside

Spectral resolutionrate 0.5 - 128cm-1

Scanning speeddegree 5 times per second at 0.5cm-1

When scanninginterval 1 300second

infraredsource Silicon carbide in1200℃

Reference stimulationlight Helium neon (15798.2cm)-1)

Detectiondevice Liquid nitrogen cooled MCT or semiconductor cooled MCT (mercury cadmium telluride)

Purge pressure maximum20PSI(1.5bar)

Spectral Room Purge Flowquantity 0.2 liters per minute, dry nitrogen or dew point below -70 ℃ without carbon dioxideofDry air

Optical System Purge Flowquantity 0.2 liters per minute, dry nitrogen or dew point below -70 ℃ without carbon dioxideofDry air

Pressure sensordevice MKS BaratronCapacitive thin film pressure sensordevice

Purge Connectionpick up Swagelok Quick connecthead

Computers are neededseek Desktop or laptop computer with Intel Pentium processor, Microsoft Windows;XP operating system, 1024 X 768display

communication RJ-45 Cross Ethernetnet

Output selectiondocument XML, Simulation, AK, itsHe

rulerinch 445mm wide *318mm high * 648mmdeep

E:\\08-AI设计及物料印刷\\17-深圳昂为 产品手册\\02第二部分 公司产品目录\\12 MKS 产品图片和资料\\QQ图片20230606171414.pngsafepretend Can be installed on a 19 inch standard machinecabinet

electricitysource 110V or 220V, 50/60hz, 3A

heavyquantity 50 publiccatty


IR Spectrum of Semiconductor Stack: Sample (white), Calibrations (color).MG 6030 can speciate (differentiate) similar molecules simultaneously.



Analyzer sampling parametersnumber

QQ图片20230606171409

Sampling temperaturedegree Room temperature to 200 ℃ (depending on calibration temperature)

Sampling speedflow 0.2 10 liters/minute

Sampling pressure 0.01 4 atmospheres (depending on calibration pressure)

knotconstitute Nickel plated aluminum or 316 stainless steel welding optionsdocument

pick uphead Swagelok  orVCR

Sampling pressure 1 atmosphere (depending on calibration pressure)

tubethe Way Heating stainless steelsteel

Graphical User Interface for Calibration

mirror Aluminum substrate nickel plate, platedGold

window KBr﹔CaF2, ZnSe (other optional))

O-shaped sealcircle Viton (other options available))

detection polelimit

5.11-meter chamber, MCT detector at 0.5cm-1At resolution, the following typical gas detection data are:

name

molecular formula

20/20TMAir chamber,

Detection value under 5-minute detection time

20/20TMAir chamber,

Detection value under 1-second detection time

ammonia

NH3

30ppb

0.5ppm

carbon dioxide

CO2

12ppb

0.2ppm

carbon monoxide

CO

72ppb

1.2ppm

formaldehyde

H2CO

36ppb

0.6ppm

hydrogen chloride

HCl

87ppb

1.5ppm

methane

CH4

36ppb

0.6ppm

nitrogen dioxide

NO2

24ppb

0.4ppm

Nitric oxide

NO

210ppb

3.6ppm

Nitrous oxide

N2O

30ppb

0.5ppm

Silicon tetrafluoride

SiF4

10ppb

0.15ppm

sulfur dioxide

SO2

36ppb

0.6ppm

Carbon tetrafluoride

CF4

2.5ppb

40ppb

Xylene sulfonamide

C8H10

60ppb

1.0ppm