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E-mail
wjb@cykeyi.com
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Phone
13837189935
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Address
201, 2nd Floor, Building 5, Zhengzhou Yida Technology New City, Jinzhan Street, High tech Zone, Zhengzhou City
Zhengzhou Chengyue Scientific Instrument Co., Ltd
wjb@cykeyi.com
13837189935
201, 2nd Floor, Building 5, Zhengzhou Yida Technology New City, Jinzhan Street, High tech Zone, Zhengzhou City
Four nozzle ultrasonic glue homogenizer and spin coating machineIt is a high-precision semiconductor and micro nano processing equipment used for coating photoresist or other functional liquids on substrates. It represents the latest development direction of uniform adhesive technology, especially suitable for coating complex structures and non planar substrates
Traditional glue homogenizers usually only have a fixed dropper or static nozzle, which covers the photoresist on the substrate through central dropper or static spray, and then spreads the gel evenly through centrifugal force generated by high-speed rotation.
The four nozzle ultrasonic glue homogenizer is a revolutionary design. It integrates the following core components:
Four independent ultrasonic piezoelectric nozzles: this is the origin of their name. Each nozzle is an independent and precise liquid distribution unit.
High precision robotic arm: These four nozzles are installed on a multi degree of freedom robotic arm, which can accurately control the nozzles to perform complex three-dimensional movements above the substrate.
Ultrasonic atomization technology: using high-frequency ultrasonic vibration to "tear" the liquid into extremely small and uniform mist droplets (usually with a diameter of micrometers), and then spraying them out through a carrier gas.
Collaborative control system: a complex software system that can synchronously control the switch, flow rate, and motion trajectory of each nozzle and robotic arm.
1、 Working principle description:
It's not simply dropping glue in the center, but rather like a machine“3DLike a printer or inkjet printer, four nozzles are controlled by a program to scan and spray on the surface of the substrate according to a preset path. Each nozzle can work independently or collaboratively, achieving coating uniformity and flexibility that Qian has never seen before.
2、 Core advantages:
Compared with traditional glue homogenizers, the four nozzle ultrasonic glue homogenizer has overwhelming advantages:
1.Uniformity of Jigao:
2.Zuo Yue's step coverage and shape preservation:
3.High material utilization rate:
4.Excellent compatibility and flexibility:
5.Reduce defects:
3、 Machine application field:
Due to its unique technological advantages, the four nozzle ultrasonic glue homogenizer is mainly used in cutting-edge technology fields with high requirements for glue coating process:
1.*Semiconductor manufacturing:
2.MEMS(Micro Electro Mechanical Systems)
3.Compound semiconductors and power devices:
4.Photon devices and optical components:
5.Display technology:
6.Research and Frontier Exploration:
4Four nozzle ultrasonic glue homogenizer and spin coating machineTechnical Specifications:
Product Name |
Four nozzle ultrasonic glue homogenizer |
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Product Model |
CY-300SS-4 |
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Spin Coater |
Round crystal size |
12inch |
Material of the cavity |
Polytetrafluoroethylene |
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heating temperature |
≤200℃ (can be used for one hour) |
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Temperature control accuracy |
+/- 0.1ºC |
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Heating method |
Infrared heating element |
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Coating duration |
0-60Seconds (adjustable) |
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coating thickness |
≤100nm(depending on your processing technology) |
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rotation speed |
30~6000rpmadjustable |
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Rotational acceleration |
30~2000rpm/sadjustable |
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speed resolution |
1rpm |
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The longest single time for uniform gluing |
3000s |
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vacuum suction cup |
a piece of2.5x2.5cm, one piece10x10cm |
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Temperature control method |
AIPSmart Temperature Control |
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Operation method |
7 Inch HDLCDtouch screen |
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Control Panel |
High definition touch screenPLCThe control panel can set spray, dehydration program and temperature control |
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Dedicated pure mechanical suction cup for dispensing machine |
12 One inch per piece (requires additional customization);6 One inch per piece (requires additional customization) |
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Oil-free vacuum pump |
Model:AP-2000V Power:0.55kw Zui low vacuum degree:- 700 mmHg;-92Kpa Maximum atmospheric flow rate:200L/min;12M3/h Weight:10kg |
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Overall dimensions |
1200x1000x1050mm |
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Ultrasonic System |
quantity |
4a |
Atomizing head material |
titanium alloy |
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frequency |
120kHz |
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power |
130W |
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traffic |
0.01-20ml/min |
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Particle diameter |
20-25um |
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Spray width |
2-20mm |
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Atomization head type |
Cone shaped |
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syringe pump |
flow range |
50mL/min |
Injection pump specifications |
10ml precision+/- 0.01 mL |
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Injection pump specifications |
100mLprecision+/- 0.01 mL |
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Linear velocity range |
5um/min-65um/min |
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Linear velocity adjustment resolution |
5um/min |
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maximum stroke |
140mm |
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Travel resolution |
0.156um |
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Rated linear thrust |
>90N |
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flow meter |
Control gas types |
2plant |
gas flow rate |
16-160mL/min |
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