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Zhengzhou Chengyue Scientific Instrument Co., Ltd
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Zhengzhou Chengyue Scientific Instrument Co., Ltd

  • E-mail

    wjb@cykeyi.com

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    13837189935

  • Address

    201, 2nd Floor, Building 5, Zhengzhou Yida Technology New City, Jinzhan Street, High tech Zone, Zhengzhou City

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Four nozzle ultrasonic glue homogenizer and spin coating machine

NegotiableUpdate on 01/08
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Overview
Four nozzle ultrasonic homogenizer spin coating machine is a high-precision semiconductor and micro nano processing equipment used for coating photoresist or other functional liquids on substrates
Product Details

Four nozzle ultrasonic glue homogenizer and spin coating machineIt is a high-precision semiconductor and micro nano processing equipment used for coating photoresist or other functional liquids on substrates. It represents the latest development direction of uniform adhesive technology, especially suitable for coating complex structures and non planar substrates

Traditional glue homogenizers usually only have a fixed dropper or static nozzle, which covers the photoresist on the substrate through central dropper or static spray, and then spreads the gel evenly through centrifugal force generated by high-speed rotation.

The four nozzle ultrasonic glue homogenizer is a revolutionary design. It integrates the following core components:

Four independent ultrasonic piezoelectric nozzles: this is the origin of their name. Each nozzle is an independent and precise liquid distribution unit.

High precision robotic arm: These four nozzles are installed on a multi degree of freedom robotic arm, which can accurately control the nozzles to perform complex three-dimensional movements above the substrate.

Ultrasonic atomization technology: using high-frequency ultrasonic vibration to "tear" the liquid into extremely small and uniform mist droplets (usually with a diameter of micrometers), and then spraying them out through a carrier gas.

Collaborative control system: a complex software system that can synchronously control the switch, flow rate, and motion trajectory of each nozzle and robotic arm.

1、 Working principle description:

It's not simply dropping glue in the center, but rather like a machine“3DLike a printer or inkjet printer, four nozzles are controlled by a program to scan and spray on the surface of the substrate according to a preset path. Each nozzle can work independently or collaboratively, achieving coating uniformity and flexibility that Qian has never seen before.

2、 Core advantages:

Compared with traditional glue homogenizers, the four nozzle ultrasonic glue homogenizer has overwhelming advantages:

1.Uniformity of Jigao:

2.Zuo Yue's step coverage and shape preservation:

3.High material utilization rate:

4.Excellent compatibility and flexibility:

5.Reduce defects:

3、 Machine application field:

Due to its unique technological advantages, the four nozzle ultrasonic glue homogenizer is mainly used in cutting-edge technology fields with high requirements for glue coating process:

1.*Semiconductor manufacturing:

2.MEMS(Micro Electro Mechanical Systems)

3.Compound semiconductors and power devices:

4.Photon devices and optical components:

5.Display technology:

6.Research and Frontier Exploration:

4Four nozzle ultrasonic glue homogenizer and spin coating machineTechnical Specifications:

Product Name

Four nozzle ultrasonic glue homogenizer

Product Model

CY-300SS-4

Spin Coater

Round crystal size

12inch

Material of the cavity

Polytetrafluoroethylene

heating temperature

≤200℃ (can be used for one hour)

Temperature control accuracy

+/- 0.1ºC

Heating method

Infrared heating element

Coating duration

0-60Seconds (adjustable)

coating thickness

100nm(depending on your processing technology)

rotation speed

30~6000rpmadjustable

Rotational acceleration

30~2000rpm/sadjustable

speed resolution

1rpm

The longest single time for uniform gluing

3000s

vacuum suction cup

a piece of2.5x2.5cm, one piece10x10cm

Temperature control method

AIPSmart Temperature Control

Operation method

7 Inch HDLCDtouch screen

Control Panel

High definition touch screenPLCThe control panel can set spray, dehydration program and temperature control

Dedicated pure mechanical suction cup for dispensing machine

12 One inch per piece (requires additional customization);6 One inch per piece (requires additional customization)

Oil-free vacuum pump

Model:AP-2000V

Power:0.55kw

Zui low vacuum degree:- 700 mmHg-92Kpa

Maximum atmospheric flow rate:200L/min12M3/h

Weight:10kg

Overall dimensions

1200x1000x1050mm

Ultrasonic System

quantity

4a

Atomizing head material

titanium alloy

frequency

120kHz

power

130W

traffic

0.01-20ml/min

Particle diameter

20-25um

Spray width

2-20mm

Atomization head type

Cone shaped

syringe pump

flow range

50mL/min

Injection pump specifications

10ml precision+/- 0.01 mL

Injection pump specifications

100mLprecision+/- 0.01 mL

Linear velocity range

5um/min-65um/min

Linear velocity adjustment resolution

5um/min

maximum stroke

140mm

Travel resolution

0.156um

Rated linear thrust

90N

flow meter

Control gas types

2plant

gas flow rate

16-160mL/min