Flight time secondary ion mass spectrometer

Flight time secondary ion mass spectrometerPHI nanoTOF3+

feature

Advanced multifunctional TOF-SIMS has stronger micro area analysis capabilities and superior analysis accuracy

Flight time secondary ion mass spectrometer

New generation TRIFT quality analyzer with better quality resolution

Unmanned automated multi sample analysis suitable for insulation materials

Ion beam technology

Parallel imaging MS/MS function to assist in the structural analysis of organic macromolecules

Multi functional optional accessories

TRIFT analyzer is suitable for wide bandwidth energy and wide stereo reception angle of samples of various shapes

Broadband energy and wide stereo acceptance angle - suitable for analysis of various morphology samples

The secondary ions excited by the main ion beam will fly out of the sample surface at different angles and energies, especially for samples with height differences and irregular shapes. Even if the same secondary ions have differences in flight time in the analyzer, it will result in a decrease in mass resolution and affect the peak shape and background of the spectrum. The TRIFT quality analyzer can simultaneously calibrate the emission angle and energy of secondary ions, ensuring consistent flight time for the same secondary ions. Therefore, TRIFT combines the advantages of high-quality resolution and high detection sensitivity, and can reduce shadow effects in imaging uneven samples.

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A primary ion device for achieving high-precision analysis

Advanced ion beam technology achieves higher quality resolution

PHI nanoTOF3+can provide high-quality resolution and high spatial resolution TOF-SIMS analysis: in high-quality resolution mode, its spatial resolution is better than 500nm; In high spatial resolution mode, its spatial resolution mode is better than 50 nm. By combining a high-intensity ion source, high-precision pulse components, and high-resolution quality analyzer, low noise, high sensitivity, and high-quality resolution measurements can be achieved; In both modes, spectral analysis can be completed in just a few minutes of testing time.

Unprecedented unmanned TOF-SIMS automated multi sample analysis - suitable for insulation materials

PHI nanoTOF3+is equipped with a newly developed automated multi sample analysis function. The program can automatically adjust the height and sample stage bias required for analysis based on the conductivity of the sample. It can perform unmanned automated TOF-SIMS analysis on various samples, including insulation materials. The entire analysis process is very simple, requiring only three steps to perform surface or depth analysis on multiple samples: ① Take photos of the sample stage in the injection room; ② Analyze the points on the photos taken in the injection room; ③ Press the analysis button, and the device will automatically start analyzing. In the past, skilled operators were required to operate the instrument specifically for TOF-SIMS analysis; Nowadays, regardless of whether the operators are proficient or not, high-quality analytical data can be obtained

Standard automated sample transfer system

PHI nanoTOF3+is equipped with a fully automatic sample transfer system that performs well on XPS: the sample size can reach 100mm x 100mm, and the analysis room comes standard with a built-in sample holder parking device; By combining the analysis sequence editor (Queue Editor), it is possible to achieve fully automated continuous testing of a large number of samples.

Adopting the newly developed pulse ionization equipment to obtain certification for automatic charged dual beam neutralization technology

Most of the samples tested by TOF-SIMS are insulation samples, and the surface of insulation samples usually has a charge effect. PHI nanoTOF3+adopts automatic charging dual beam neutralization technology, which can achieve true automatic charging neutralization of any type and morphology of insulating materials by simultaneously emitting low-energy electron beams and low-energy ion beams, without the need for additional human operation.

*Need to select Ar ion equipment

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Remote access enables remote control of instruments

PHI nanoTOF3+allows access to the instrument via a LAN or the Internet. Simply place the sample stage into the injection chamber, and all operations such as injection, sample replacement, testing, and analysis can be remotely controlled. Our professionals can perform remote diagnosis on the instrument.

*If remote diagnosis is required, please contact our customer service personnel.‍

From section processing to section analysis: only one ion source is needed to complete it

Standard ion equipment FIB (Focused lon Beam) function

In PHI nanoTOF3+, liquid metal ion equipment is equipped with FIB function, which allows for cross-sectional processing and cross-sectional TOF-SIMS analysis of samples using a single ion device. By operating the computer, the entire process from FIB processing to TOF-SIMS analysis can be quickly and easily completed. In addition, FIB processing can be carried out under cooling conditions.

When selecting a Ga source for FIB processing, a 3D image of the FIB processing area can be obtained; Ga source can also be used as a secondary analysis source for TOF-SIMS analysis.

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Molecular structure analysis by parallel imaging MS/MS [optional]

Simultaneous acquisition of MS1/MS2 data using MS/MS parallel imaging

In TOF-SIMS testing, the MS1 mass analysis analyzer receives all secondary ion fragments generated from the surface of the sample. For large molecular ions with similar mass numbers, the MS1 spectrum is difficult to distinguish. By installing tandem mass spectrometry MS2, collision induced dissociation can be performed on specific ions to produce characteristic ion fragments. MS2 spectra can further identify the molecular structure.

PHI nanoTOF3+has tandem mass spectrometry MS/MS parallel imaging function, which can simultaneously obtain MS1 and MS2 data in the analysis area, providing a powerful tool for the structural analysis of organic macromolecules.

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Diversified configurations fully unleash the potential of TOF-SIMS

Detachable glove box: can be installed in the sample introduction room

A detachable glove box can be optionally connected directly to the sample injection chamber. Samples such as lithium-ion batteries and organic OLEDs that are prone to reacting with the atmosphere can be directly installed on the sample stage. In addition, when replacing the sample after cooling analysis, it can prevent frosting on the surface of the sample.

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Ar GCIB: Deep Analysis of Organic Materials

The use of argon cluster ion source (Ar GCIB) can effectively reduce the damage to organic materials during sputtering, thereby preserving the structural information of organic macromolecules during etching.

Cs source and Ar/O2 source: in-depth analysis of inorganic materials

Different ion sources can be selected according to testing requirements to increase secondary ion yield, and the use of Cs sources can enhance negative ion yield; O2 source can enhance positive ion yield