EP grade distillation unit

NegotiableUpdate on 12/18

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Nature of the Manufacturer: Producers

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Overview

The EP grade distillation unit is the core equipment for producing electronic specialty gases. Through precision distillation purification, the gas purity reaches over 99.999%, meeting the needs of semiconductors

Product Details

1、 Core Definition and Application Scenarios

EP grade distillation unit, also known as Electronic Pure grade distillation unit, is a high-precision gas purification equipment designed specifically for the electronics industry. It removes trace impurities (such as water, metal ions, hydrocarbons, etc.) from the gas through multiple and precise distillation processes, ultimately achieving a gas purity of over 99.999% (5N), and in some scenarios, a purity of 99.9999% (6N) can be achieved.

Mainly used in semiconductor chip manufacturing, photovoltaic cell production, electronic component processing and other fields, providing high-purity electronic specialty gases (such as hydrogen, oxygen, ammonia, etc.) for key processes such as etching and deposition, directly affecting product yield and performance.

2、 Core working principle

Based on the distillation principle of "different boiling points of substances" and combined with the strict requirements of electronic grade production, the process is divided into three steps:

Pre treatment stage: The raw gas is first subjected to pre-treatment such as filtration and drying to remove most of the solid particles and moisture, avoiding equipment blockage or pollution in the future.
Precision distillation stage: The pre treated gas enters a specially designed distillation tower, where the gas-liquid contact area is increased through trays or packing inside the tower. By utilizing the cycle of bottom heating and top condensation, the volatile components (target gas) and non-volatile components (impurities) in the gas are repeatedly separated, gradually improving the purity.
Post purification stage: The gas produced from the top of the distillation tower undergoes secondary purification such as adsorption and membrane separation to further reduce the content of trace impurities and ultimately reach EP level standards.

3、 Key technical features

Special Material: To meet the purification requirements, the components of EP grade distillation equipment that come into contact with gas, such as distillation towers, pipelines, and valves, are mostly made of 316L stainless steel or Hastelloy alloy, and the inner walls are electrolytic polished (EP polishing) to reduce impurity adsorption and dissolution.
Accurate control: Equipped with high-precision temperature, pressure, and flow sensors and an automatic control system, it can adjust distillation parameters in real time (such as controlling the temperature difference inside the tower within ± 0.1 ℃) to ensure stable purity.
Ultra low leakage design: Adopting a sealed structure and helium mass spectrometry leak detection technology, the leakage rate is controlled below 1 × 10 ⁻⁹ Pa · m ³/s to prevent external impurities from infiltrating.