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Address
Room 707, 599 Lingling Road, Xuhui District, Shanghai
Shanghai Nateng Instrument Co., Ltd
Room 707, 599 Lingling Road, Xuhui District, Shanghai
Desktop multi field auxiliary chemical mechanical polishing equipment
Desktop multi field auxiliary chemical mechanical polishing equipment, compatible with up to 4-inch samples, can customize special size polishing heads. 3-8 pneumatic channels. Use a specialized structure "two-point bead positioning" flange device
Calculate. Accurate positioning and easy disassembly.
Sample processing size: compatible with up to 4 inches, can customize special size polishing heads.
Process clamping method: manual operation.
Polishing head downforce: maximum 350N (higher pressure can be opened according to demand)
Polishing head speed: up to 120RPM (higher speed can be opened according to demand)
Disc polishing speed: up to 120RPM (higher speeds can be opened according to requirements)
Disc diameter: 300mm.
Polishing solution: 2 channels, maximum flow rate of 200mL/min (higher flow rate can be opened according to demand)
Online measurement module: motor torque, speed, air pressure, etc.
Multi field module: optional power distribution chemistry module, photocatalytic module

Maintain independent pressure control for the ring/sample, enabling multi-stage pressure application.Desktop multi field auxiliary chemical mechanical polishing equipment