3D measurement profilometer

3D measurement profilometer

3D measurement profilometer

Three dimensional surface micro measurement and roughness evaluation are widely used in precision machining, semiconductor machining, material analysis and other fields

advantage

√Sub nanometer level longitudinal resolution, suitable for smooth surface measurement and analysis

√Simple, precise, fast, and reproducible

√Rich measurement modes support different2D/3DMeasurement requirements

function

√Non contact measurement of surface three-dimensional roughness

√Surface micro three-dimensional structure measurement

√Measurement and Analysis of Film Thickness

√Microscopic reflectance spectroscopy measurement(select)

Applicable subjects

Precision optical components, micro nano processing devices, metal machined parts, wafers, etc

Measuring principle

√Principle of White Light Interference Microscopy Measurement: Using a white light source, incoherent light interference and high-resolution microscopy imaging technology are combined to form a microscopic structureThree dimensional contour, using different measurement magnification objectives, longitudinal measurement resolution can reach sub nanometer level

√Microscopic Spectral Measurement: The optional spectral module can achieve surface micro area spectral measurement and film thickness measurement functions

Actual test cases