Chemical feed pump - semiconductor high-purity electronic chemical pump

BMThe series capsule metering pump is a corrosion-resistant, perfluorinated flow path, high-precision chemical feed pump launched by Sanwei Science,The material in contact between the bag type metering pump and the medium isPFAThePTFE,The flow path does not contain metal materials, and the design without a shaft seal can prevent liquid leakage and external gas from entering. Therefore, capsule metering pumps are often used for the transportation of demanding materials in the semiconductor, life science, and chemical fields, such as photoresist, hydrofluoric acid, phosphoric acid, hydrochloric acid, potassium hydroxide, liquid hydrogen fluoride, hydrobromic acid, liquid chlorine, sulfuric anhydride, fuming sulfuric acid, fuming nitric acid, butyl lithium, Grignard reagent, concentrated sulfuric acid, concentrated phosphoric acid, etc.

The three series of airbag pump products include:

Single airbag pump: used for single and multiple quantitative discharge of liquid materials

Dual airbag pump: used for continuous and uninterrupted quantitative discharge of liquid materials

Product Features:

・The liquid receiving part of the flow path is only composed of fluororesin, which can transport various drugs such as strong corrosive acids, bases, and salts

・The liquid receiving part has no sealing ring and sliding structure, and does not produce micro particles during operation, with no risk of sealing ring leakage

・No external gas entering, less likely to produce electrolyte crystallization structure

・Can transport high viscosity materials and trace gas materials

・Screw drive can achieve high-precision continuous flow fluid transportation

Product Usage

・Transportation of high viscosity, high concentration, and highly corrosive materials in the chemical industry

・Photoresist and high-purity electronic chemical transportation in semiconductor processes

・Electrolyte transportation in the manufacturing process of lithium-ion batteries and other batteries

・Clean material transportation in the field of biomedicine

・Quantitative transportation of other liquid chemicals or liquid materials

Product parameters of electric airbag pump: