- Phone
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Address
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
Shanghai Nateng Instrument Co., Ltd
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
Desktop plasma cleaning and etching system, plasma etching&Reactive ion etching system
Chamber structure:

Model comparison:

Application:
·EtchingOxide etchingRIEMode, nitride etchingRIEMode, silicon etchingRIEMode, photoresist etchingRIEPattern, polymer(RIE+PE)Two dimensional materialsRIE
·Surface TreatmentHydrophilic treatmentPEMode, functionalizationPEMode, enhanced adhesion:PE+RIEPolymer: RIE+PE
