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Shanghai Nateng Instrument Co., Ltd

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    Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China

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Block resistance tester

NegotiableUpdate on 01/24
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Overview
Block resistance tester
Product Details

FilmetricsMeasurement of Thin Film ResistanceThe device originated from havingexceed30KLA's Years of ExperienceThin film resistance measurement technology, developed by 20yearFilmetrics with experience in developing desktop measuring equipmentThe team has improvedDesktop block resistance measurement product.KLA thin film resistance measurementTechnologies include contact (4PP) and non-contact (EC) methods.

Filmetrics R50seriesblockResistance measuring instruments can measure conductive sheets and films deposited on various substrates,Across 10 orders of magnitude rangeresistivity, including:

Semiconductor wafer substrate

glass substrate

Plastic (flexible) substrate

PCBPattern features

solar cell

Flat panel display layer and patterned features

metallic foil

2、 Main functions

ltechnologyspecifications

Model

Description

R50-4PP

Four probe testing

automaticXYmobile station-100mm*100mm

Can be directly implemented100mmWafer block resistormappingmeasure

Can be placed with a diameter200mmPrototype Wafer

R50-EC

Non contact eddy current testing

automaticXYmobile station-100mm*100mm

Can be directly implemented100mmWafer block resistormappingnon-contactmeasure

Can be placed with a diameter200mmPrototype Wafer

R50-200-4PP

Four probe testing

automaticXYmobile station-200mm*200mm

Can be directly implemented200mmWafer block resistormappingmeasure

R50-200-EC

Non contact eddy current testing

automaticXYmobile station-200mm*200mm

Can be directly implemented200mmWafer block resistormappingnon-contactmeasure

3、 Application

Support a wide range of measurements, including but not limited to the following:

Metal film thickness, substrate thickness, sheet resistance, resistivity, conductivity, multilayer film