Good news! Wuhan Yiguang Technology Co., Ltd. won the first prize of Hubei Province Technology Invention Award in 2019-Chemical Instrument Network

The project "Key Technology and Nanomeasurement Application of High Precision Wide Spectrum Mueller Matrix Ellipticity Measurement" jointly developed by Huazhong University of Science and Technology and Wuhan Yiguang Technology Co., Ltd. has won the first prize of Hubei Province Technology Invention Award. This award is established by the Provincial People's Government, reviewed by the Provincial Science and Technology Award Evaluation Committee, deliberated by the Provincial Science and Technology Award Committee, and finally awarded after the decision of the Hubei Provincial People's Government. It aims to deepen the implementation of the innovation driven development strategy, build an innovative strong province, and reward scientific and technological personnel and organizations who have made outstanding contributions to the progress of science and technology and economic and social development in the province.

The Mueller matrix ellipsometer is widely used in various aspects of national emerging strategic industries such as IC manufacturing, flat panel displays, optoelectronic devices, photovoltaic solar energy, and flexible electronics, including basic scientific research on nanomaterials, nanostructures, and nanodevices, manufacturing process optimization, and online monitoring of mass production. It has strategic significance.

The Mueller matrix ellipsometer developed by the "Key Technologies and Nanomeasurement Applications of High Precision and Wide Spectrum Mueller Matrix Ellipsometry Measurement" project represents the high level of ellipsometer technology. Its development process mainly faces three technical challenges: broadband full Mueller matrix polarization modulation technology, Mueller matrix ellipsometry measurement system parameter precision calibration and error correction technology, and complex nanostructure thin film ellipsometry measurement theory and method. After more than 10 years of overcoming technical difficulties, Huazhong University of Science and Technology and Wuhan Yiguang Technology Co., Ltd. have successfully developed * high-precision and wide spectrum Mueller matrix with * independent intellectual property rights in China through principle innovation with the support of * National Major Scientific Instrument and Equipment Development Special Project, National 863 Program, National Natural Science Foundation and other * projects. The ellipsometer has achieved the transformation and industrialization of achievements.