A diffraction grating is an optical device composed of periodically arranged slits or grooves. Based on the principles of multi beam interference and diffraction, it accurately separates incident light by wavelength to form a clear spectrum.
CT type vacuum ultraviolet spectrometer adopts Czerny Turner optical structure, which can spatially divide complex light into a series of single light. The system consists of a flat surfacediffraction gratingComposed of front and rear collimating focusing mirrors and CCD detectors. The CT type vacuum ultraviolet spectrometer can be applied in large-scale scientific equipment, space and defense, and semiconductor extreme ultraviolet light source and detector research.

Product Features:
1. Hyperspectral resolution
2. Online precision adjustable slit
3. Remote laser aiming and positioning
3. Compact structure with high integration
4. High vacuum compatibility
Main parameters:
·Optical system structure: CT type
·Focal length: 270mm, customizable and adjustable
·Spectral resolution:<1nm
·Slot width: 5-300 μ m, continuously adjustable online
·Wavelength accuracy: ± 0.05nm@230nm
·Spectral range: 115-400nm, choose according to the grating model
·System receiving angle: f/#=4.0
·System vacuum degree: 10 ³ Pa
Optional range:

Test data:

Application fields:
Research on large scientific facilities, space and defense, semiconductor extreme ultraviolet light sources and detectors.