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Wuxi Geocenter Technology Co., Ltd
ZTT-V2 series customized motion system for swing table
NegotiableUpdate on 05/06
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Overview
The custom motion system of ZTT-V2 series swing table is a three-axis precision positioning platform that integrates vertical lifting and horizontal leveling. It is driven by a linear motor and coupled with precision spherical hinges, providing excellent micro motion accuracy and dynamic performance. The overall height is small, the size is exquisite, the rigidity is high, the load capacity can reach 10kg, and it is compatible with clean room environments. $r $n $r $nZTT-V2 not only has point-to-point static positioning accuracy, but also outstanding dynamic accuracy, which can adapt to applications such as wafer inspection, optical alignment, panel inspection, or maskless lithography that require strict requirements for micro motion and dynamic tracking errors.
Product Details
ZTT-V2 series customized motion system for swing tableIt is a vertical lifting and horizontal leveling three-axis integrated precision positioning platform, driven by a linear motor and coupled with precision spherical hinges, with excellent micro motion accuracy and dynamic performance. The overall height is small, the size is exquisite, the rigidity is high, the load capacity can reach 10kg, and it is compatible with clean room environments.
ZTT-V2 series customized motion system for swing tableIn addition to point-to-point static positioning accuracy, it also has outstanding dynamic accuracy, which can adapt to applications such as wafer inspection, optical alignment, panel inspection, or maskless lithography that require strict requirements for micro motion and dynamic tracking errors. It can adjust the height and angle posture in real time according to the sensor focusing height, and solve customers' motion control problems in multiple directions.
ZTT-V2 platform minimum steptest
Z-direction 20nm step
Stability of each axis in position
| Axis name | Z | θx | θy |
| Effective itinerary \ Travel | 5mm | 2° | 2° |
| Positioning accuracy | ±0.3 μm | NA | NA |
| Repetitive positioning accuracy \ Bi Reposability | ±0.1 μm | ±0.1 arcsec | ±0.1 arcsec |
| Maximum Speed (1) | 20 mm/s | NA | NA |
| Maximum Acceleration (1) | 1 g | NA | NA |
| Minimum Incremental step (2) | 20nm | 0.05 arcsec | 0.05arcsec |
| Maximum Load Capacity | 10 kg | ||
| Platform Weight \ Stage Mass | 8 kg | ||
| Platform Material | aluminium | ||
Note:
(1) No load, corresponding power amplifiers need to be configured;
(2) The default test point position is 25 mm above the tabletop.
Note:
(1) Unit: mm;
(2) The cable connector is not displayed;
(3) The complete 3D drawings can be downloaded.
Product configuration options
| Product Series | Tabletop size | feedback |
| ZTT-V2 | -200 | -AS |
Feedback options
| -AS | VPP 1-volt sine analog input |
