Wafer inspection motion table

Wafer inspection motion tableIt is an XYZT 4-axis integrated precision positioning platform. XYZ is driven by a linear motor and uses precision cross roller guide rails, which have excellent performance and positioning accuracy. The XY axis no-load cut-off frequency can reach over 120Hz, with good speed stability. The CUBE-4 uniform speed segment position error is tested using an interferometer with a sampling frequency of 5K above the 4-axis stacked table, and the dynamic tracking error STD standard deviation per 0.5mm position is less than 50nm. The Z-axis no-load cut-off frequency can reach over 200Hz. Theta axis adopts a rotating direct drive motor, equipped with circular guide rails and gratings, which combines high speed and high precision. In addition, the Theta axis adopts a sunken hidden design, which makes the overall height of CUBE-4 lower and the working point lower, which is beneficial for improving positioning accuracy in practical applications.

In addition, the Z-axis can step 100 μ m within 30ms and be tuned to ± 50nm. CUBE-4 is a device that combines point-to-point static accuracy with outstanding dynamic accuracy, which can adapt to biological or wafer detection scanning applications with strict requirements for dynamic errors. The Z-axis can be adjusted in real-time at high speed according to the sensor working distance height, solving customers' motion control problems.

CUBE-4 series four axis platform dynamic performance testing

Interferometer 5k sampling frequency dynamic test: XY uniform speed segment position tracking error, STD standard deviation less than 50nm per 0.5mm

CUBE-4 series four axis platform minimum step test

Z-axis step of 100 μ m, set to ± 50nm within 30ms

Wafer inspection motion tableremark

(1) Measure parallel or perpendicular to the direction of the wedge block;

(2) No load test;

(3) Apply force along the axis direction;

(4) Adaptation - AS feedback, configure linear amplifier;

(5) The default test point position is 25 mm above the tabletop, and the performance indicators of single axis and multi axis systems are related to the actual load and working point position;

(6) Other itineraries can be customized.