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E-mail
jinwen2022@126.com
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Phone
19542994910
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Address
Room 301, Baichuanghui, 689 Binhe Road, Suzhou
Product Categories
- Ultra high temperature hot table
- Wafer heating device
- SEM hot and cold table
- Ultra high temperature infrared focusing heating furnace
- Peltier hot and cold table
- Probe hot and cold table
- Ultra high temperature resistivity testing system
- In situ cold and hot microscopic analysis system
- In situ ultra-high temperature microscopic analysis system
- filter press
- Optical cooling table
- XRD hot and cold table
Guoguo Instrument Technology (Shanghai) Co., Ltd
Wafer heating plate/module (customized)
NegotiableUpdate on 01/31
- Model
- Nature of the Manufacturer
- Producers
- Product Category
- Place of Origin
Overview
Wafer heating plate and wafer heating module (customized) are very important in the semiconductor process, especially in some key processes such as wafer annealing, bonding, uniform bonding, etching, vapor deposition, etc. It can provide a stable temperature field environment and precise uniform temperature of the disc surface, ensuring the heating requirements of the wafer in various temperature zones, thereby achieving the manufacturing and research and development of semiconductor devices.
Product Details
Products related to temperature control technology, in-situ mechanics technology, etc., such as wafer heating systems, rapid annealing furnaces, high and low temperature test chambers, can provide personalized customization for customers.
Fruit Instrument Wafer Heating Module:It is very important in the semiconductor process, especially in some key processes such as wafer annealing, bonding, uniform bonding, etching, vapor deposition, etc. It can provide a stable temperature field environment and precise uniform temperature of the disk surface, ensuring the heating requirements of the wafer in various temperature zones, thereby achieving the manufacturing and research and development of semiconductor devices.
Wafer heating module (customized)Features:
• Temperature range: RT~600 ℃
• Temperature stability: ± 0.1 ℃
• Material: Aluminum alloy, stainless steel, Invar alloy, etc
High precision temperature control
Professional temperature control software
• Support customization
parameter
model |
Wafer heating module (customized) |
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size |
2/4/6/8/10/12 inches |
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temperature range |
RT~600℃ |
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temperature stability |
±0.1℃ |
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material |
Aluminum alloy, stainless steel, Invar alloy, etc |
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flatness |
≤10um， Up to 3um, depending on the material |
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Applicable Environment |
Atmosphere/Vacuum |
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cooling system |
Optional: water-cooled, air-cooled, etc |
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Bonding pressure |
Optional: 0~100kN |
|
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