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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
VS100 vacuum pressure switch
NegotiableUpdate on 01/07
- Model
- Nature of the Manufacturer
- Producers
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- Place of Origin
Overview
The VS100 vacuum pressure switch uses a piezoresistive pressure sensor to detect pressure changes in the medium, compares them with the preset pressure action point, and converts the pressure into a switch signal. Applied in the fields of integrated circuits, packaging, semiconductor lighting, power semiconductors, and compound semiconductors.
Product Details
innovation points
Action pressure points can be set to effectively reduce material types and customer inventory categories
The pressure action point settings include 75-735Torr, 20-990Torr, etc.
high precision
Can replace traditional mechanical vacuum switches.
Application field
Semiconductor - Integrated Circuit
Semiconductor - Packaging
Semiconductor lighting
Power Semiconductor
Compound semiconductor
technical indicators
| model | VS100 | |
| Range and pressure action point setting | range | Pressure action point setting |
| Absolute pressure 750Torr | 75-735Torr | |
| Absolute pressure 1000Torr | 20-990Torr | |
| Gauge pressure -750 to 750 Torr | -150-110Torr | |
| Note: The pressure action point setting value is generally between 1% * FS and 99% * FS | ||
| default settings | The default for the universal model is: upper limit alarm, action point 99% FS, hysteresis 2% FS. When setting, it is necessary to use the specialized software and cables provided by the supplier. | |
| precision | ±0.5%FS | |
| leak rate | <1x10-9atm.cc/sec He | |
| temperature coefficient | 0.1% FS/℃ | |
| Operating temperature range | 0～80℃ | |
| Voltage endurance limit | 2 times the rated pressure | |
| burst pressure | 5 times the rated pressure | |
| Process side materials | 316L Ss SEMI F20/Hastelloy C-276 | |
| power supply voltage | 24V±10%VDC | |
| output | When the output of the passive contact relay (1NO, 1NC) is not powered on, NO is open and NC is closed | |
| electrical interface | Scattered/DB9 male | |
| Action point setting method | Factory settings/client settings | |
| interface type | 1.125“C-seal/1.125”W-seal/4VCR/KF25(NW25)/KF16 | |
