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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
BV200 butterfly valve
NegotiableUpdate on 01/07
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Overview
BV200 butterfly valve is a digital pressure control valve product that provides high accuracy and reliability for gas pressure control. This type of product supports digital signal control and uses a single power supply+24 VDC power supply.
Product Details
innovation points
Dual channel self matching pressure sensing technology
Supports dual channel vacuum gauge signal acquisition, compatible with ± 15V or ± 24 vacuum gauge power supply, and can automatically switch ranges according to process requirements.
Self learning functional technology
Support self-learning function, can adapt to different chamber vacuum systems and different working conditions, and achieve fast and accurate pressure control.
L-V-P pressure control technology
The pressure control unit records the relationship between pressure and valve opening in the process environment, using a combination of position, velocity, and pressure three loops. At the same time, it dynamically calculates the pressure to position ratio, position to pressure ratio, target pressure position, and estimated time to reach the target pressure, actively intervening in changes in valve opening to achieve rapid and stable pressure control.
Servo drive technology
Adopting a customized servo control on-chip system, the butterfly plate is positioned faster through multi-point slope control algorithm, and the switch response time can reach 0.2 seconds.
Application field
Semiconductor - Integrated Circuit
Power Semiconductor
technical indicators
| model | BV200 | |
| material | Valve body/valve plate | Aluminum alloy 6061/stainless steel 613L |
| Shaft/valve plate screws | Stainless steel 316L | |
| Bearing sleeve | lglidur X | |
| bearing seal ring | Environmental end | FKM |
| Vacuum end | FKM | |
|
Valve body leakage rate | stainless steel material | 1×10E-9 mbar ·L/s |
| communication interface | RS485 (D-sub female, DB25) or DeviceNet (DNET aviation plug) | |
| Power supply port | interface type | D-sub male,DA15 |
| voltage | +24 VDC | |
|
power consumption | Control/Drive | 40 W |
| Usage environment | temperature | 0-50 degrees Celsius, recommended for use below 35 degrees Celsius |
| humidity | 0~95%RH | |
| Standard interface parameters | interface type | D-sub female,DA15 |
| signal voltage | 0-10VDC linear pressure | |
| ADC resolution | 0.1 mV | |
| sampling time | 2ms | |
| Supply voltage (output) | +24 VDC/1.5A max. | |
| actuator | stepper motor | |
| Motor resolution | 12800(90°) | |
| Voltage control accuracy | 5 mV or 0.1% of the set point, whichever is greater | |
| Protection level | IP 40 | |
| inner diameter of the channel | 40mm/50mm/63mm/80mm/100mm | |
| Valve opening and closing time | 0.2s | |
Note:
Butterfly valves are usually calibrated for sensor signals using voltage when leaving the factory
The unit of gas pressure is specified as Torr; Mbar (millibars)
The standard state is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg)
In Huacheng Electronic PC products, the unit SCCM is equivalent to "mL/min, 0 ° C, 1atm", and the unit SLM is equivalent to "L/min, 0 ° C, 1atm"
F. S. (Full Scale): Full scale value; S. P. (Set Point): Set point value
