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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
BV300 butterfly valve
NegotiableUpdate on 01/07
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Overview
BV300 butterfly valves are widely used in semiconductors, flat panel displays, crystalline silicon solar energy, and industrial processes to control downstream pressure in chambers. They can be customized to meet the rapid pressure control requirements under harsh process conditions.
Product Details
innovation points
Dual channel self matching pressure sensing technology
Supports dual channel vacuum gauge signal acquisition, compatible with ± 15V or+24V vacuum gauge power supply, and can automatically switch ranges according to process requirements.
L-V-P pressure control technology
The pressure control unit dynamically calculates the pressure position ratio, position pressure ratio, target pressure position, and estimated time to reach the target pressure by recording the relationship between pressure and valve opening in the process environment, and using a combination of position, velocity, and pressure three loops to achieve rapid and stable pressure control.
Self learning functional technology
Support self-learning function, can adapt to different chamber vacuum systems and different working conditions, and achieve fast and accurate pressure control.
Servo drive technology
Adopting a customized servo control on-chip system, the butterfly plate is positioned faster through multi-point slope control algorithm, and the switch response time can reach 0.2 seconds.
Application field
Semiconductor - Integrated Circuit
Semiconductor - Packaging
Semiconductor display
Semiconductor lighting
Semiconductor Micro Electro Mechanical Systems
Power Semiconductor
Compound semiconductor
technical indicators
| model | BV300 |
| Flange end interface form and size | ISO-KF:DN40、DN50; ISO-F: DN63、DN80、DN100、DN160、DN200 |
| leak rate | 1 ×10E-9 mbar l/s |
| Pressure range (at 20 ℃) | 1×10E-8mbar-1.2bar (abs) |
| Pressure control accuracy | 5 mV or 0.1%of setpoint, Take both |
| Sensor input signal | 0-10VDC |
| material | Valve body/plate: 316L/aluminum; Sealing ring: Fluororubber/Perfluoro |
| position resolution | 12800 (90 ° angle) |
| response time | Non sealed version: switch 0.2S; sealed version: switch 0.6S |
| communication interface | D-Sub, DB-25 Female, RS422/RS485, RS232, DeviceNet,EtherCAT |
| power supply interface | D-Sub, DA-15 male, +24 VDC(±10%)@0.5 V pk-pk max |
| Vacuum gauge interface (sensor interface) | D-Sub, DA-15 female |
| Operating environment temperature | 0 ℃ to+50 ℃ Max. (recommended<35 ℃) |
| Installation location | Horizontal and vertical installation |
Note:
Butterfly valves are usually calibrated for sensor signals using voltage when leaving the factory
The unit of gas pressure is specified as Torr; Mbar (millibars)
The standard state is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg)
F. S. (Full Scale): Full scale value; S. P. (Set Point): Set point value
