Ultra high vacuum coating equipment

1、 Core parameters:

Price range: 2 million to 3 million

Instrument type: Electron beam evaporation coating machine

Origin category: Domestic

Application field: Microelectronics

Substrate size: 4 inches (customizable)

Target material: AL

Substrate temperature range: RT-900 º C

Uniformity of film thickness: uniformity<3%

Extreme vacuum:<1E-9Torr

2、 Josephson junction ultra-high voltage system:

Ultra high vacuum coating equipmentProfessional preparation of Josephson junctions, which can accurately grow the required metal layers and oxide insulation layers, ensuring high-performance preparation and high yield; This coating instrument has four high vacuum chambers, including an injection chamber, an argon ion cleaning chamber, an electron beam evaporation chamber, and an oxidation chamber. A sample transfer rod is used for high vacuum sample transfer between the chambers, and the transfer module must adopt a grasping design; All processes of the equipment support wafers or irregular samples of 4 inches or less. The entire process of the equipment can be automatically operated according to the parameters set by the user. The process flow includes but is not limited to: vacuuming, monitoring air pressure, ion cleaning, sample position adjustment, sample transfer, heating, electron beam evaporation with specific thickness settings, automatic adjustment of air pressure, etc.

3、 Xiamen Yunmao Technology Co., Ltd. provides you withUltra high vacuum coating equipmentThe parameters, price, model, principle and other information of QBT-J. QBT-J is produced in Fujian, brand is Yunmao, model is QBT-J, and the price is 2-3 million RMB. For more related information, please consult our customer service hotline 24/7.

4、 After sales service:

Warranty period: 1 year

Can the warranty period be extended? No

On site technical consultation: Yes

Free training: Before the equipment leaves the factory, at least 2 people will receive one week of original factory training. 2. The equipment is installed and debugged on site

Free instrument maintenance: can be arranged if needed

Warranty maintenance commitment: During the warranty period (except for natural disasters and human damage), the cost of parts, components, and travel expenses will be borne by our company

Repair commitment: In case of any malfunction during the warranty period, our company will respond promptly and send technical personnel to the site within 8 hours to solve the problem

5、 Technical parameters: