Ultra high resolution field emission scanning electron microscope Regulus 8100

The "Regulus Series" is a new brand of FE-SEM from Hitachi High Tech, including the "Regulus 8100" developed as a successor to the SU8010 and the upgraded "Regulus 8220", "Regulus 8230", and "Regulus 8240" models of the SU8200 series, all of which have achieved enhanced resolution and operability.

Scanning Electron Microscopy (SEM) is widely used in nanotechnology and semiconductor applications? Observation of material structures in fields such as electronics, life sciences, and materials science. In recent years, the research on new carbon materials, polymer materials, composite materials, and other advanced technologies that have been widely anticipated in the application of new generation electronic devices has been highly sought after worldwide. Are scanning electron microscopes widely used for observing these materials? Evaluation, but having ultra-high resolution alone is far from enough. It also requires the ability to observe surface microstructures and perform high-sensitivity elemental analysis at low acceleration voltages. In addition, continuous stability and reliability of electron microscopy performance are also pursued in the long-term research process.

The newly released brand "Regulus series" electronic optical system has been optimized, resulting in a resolution increase of about 20% compared to previous models when landing voltage is 1kV. Regulus 8220/8230/8240 has a resolution of 0.9nm, while Regulus 8100 has a resolution of 1.1nm. In addition, the cold field electron gun, which is most suitable for high-resolution observation under low acceleration voltage, can magnify the details of the sample and obtain high-quality images. The maximum magnification has also been increased from 1 million times to 2 million times.
In addition, in order to better cope with the testing and maintenance of different samples and achieve high performance, user assistance functions have also been strengthened, such as the operation and maintenance assistance functions of the signal detection system.

Main Features

1. Equipped with a cold field electron gun with minimal color difference, suitable for low acceleration voltage and high-resolution observation

2. Compared to the previous generation model, the resolution has increased by approximately 20%
   （Regulus8220/8230/8240：0.9 nm/1 kV，Regulus8100：1.1 nm/1 kV）

3. The maximum magnification has increased from 1 million times to 2 million times^*1

4. User assistance function, helping users fully utilize the high performance of the instrument

Main parameters

*1 Regulus 8240/8230/8220 only

*Observation of deceleration mode 2

*Picture magnification of 3 127 mm × 95 mm field of view

*4 5-axis motor table is an optional item