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E-mail
research@resemtech.com
- Phone
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Address
C305, No. 88 Baifu Road, Kunshan Economic Development Zone, Jiangsu Province
Kunshan Ruisai Qi Precision Instrument Co., Ltd
research@resemtech.com
C305, No. 88 Baifu Road, Kunshan Economic Development Zone, Jiangsu Province
Related parameters:
| project | describe |
| SE resolution | 3.0nm (30kV), High vacuum mode/10nm (3kV), high vacuum mode |
| BSE resolution | 4.0nm (30kV), Low vacuum mode |
| Magnification factor | x5 ~ x300,000 |
| Accelerating Voltage | 0.3 ~ 30 kV |
| Low vacuum range | 6 ~ 270 Pa |
| Maximum sample size | Diameter 200mm |
| sample stage | Type I Type II |
| X | 0 ~ 80mm 0 ~ 100mm |
| Y | 0 ~ 40mm 0 ~ 50mm |
| Z | 5 ~ 35mm 5 ~ 65mm |
| R | 360o 360o |
| T | -20o~ +90o -20o ~ +90o |
| T | -20o~ +90o -20o ~ +90o |
| Maximum sample height | 35mm (WD=10mm) 80mm (WD=10mm) |
| Drive | Manual five axis motor drive |
| filament | Centered cartridge filament |
| objective aperture | Removable 4-hole objective light barrier |
| Gun bias voltage | Fixed proportional bias, manual bias, and automatic 4-bias |
| detector | Secondary electron detector, high sensitivity semiconductor backscattered electron detector |
| Analyze location | WD=10mm, TOA=35o |
| control | Mouse, keyboard, manual knob |
| Automatic tuning | Automatic filament saturation, automatic 4-bias voltage, automatic gun alignment, automatic beam setting, automatic axis alignment, automatic focusing and anti astigmatism, automatic brightness contrast |
detailed description
The S-3400N has powerful automatic functions, including automatic filament saturation, 4-bias voltage, automatic gun centering, automatic beam current setting
Automatic axis alignment, automatic focusing and astigmatism correction, automatic brightness contrast, etc.
2. Ensure a resolution of 10nm at a low acceleration voltage of 3kV.
3. New 5-segment high-sensitivity semiconductor backscatter probe.
The S-3400N II model has a five axis motor platform with a tilt angle of up to -20 degrees to+90 degrees, and the sample can reach a maximum of 80mm.
5. The analysis sample warehouse can be equipped with EDX, WDX, and EBSD simultaneously.
6. The vacuum system uses a turbo molecular pump, which is clean and efficient