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Thermo Fisher EscaLab Xi+X-ray photoelectron spectrometerPerformance analysis:
Qualitative and quantitative analysis of surface elements
The combination of energy analyzer design and dual crystal micro focusing monochromatic X-ray source achieves energy resolution
● Fast high-resolution parallel imaging
Chemical imaging: spatial resolution better than 1um
Tracing back spectrum: Tracing back area is better than 6um
● No need for bottom correction detector
The dual detector design of electron multiplier and resistance anode detector can meet the requirements of high-performance XPS spectroscopy and high spatial resolution XPS imaging.
The innovative technology of spatially continuous resistive anode detector enables XPI imaging resolution to reach 1um, while the obtained data has no detector background features and does not require background correction, directly obtaining quantitative element distribution imaging results with micrometer scale resolution.
● Micro focused monochrome source
The analysis size is continuously adjustable between 20 μ m and 900 μ m
Sensitivity and energy resolution
Provide no less than 20 target material working points to ensure that the anode target does not need to be replaced during the lifetime use of the instrument
● Automated and efficient ion analysis source
New Ar ion clusters combined with traditional single particle ion sources for in-depth analysis of various materials
● High precision angular resolution XPS
Software controls the analysis position and angle to ensure the accuracy and repeatability of data
A complete set of ARXPS data processing tools, capable of calculating layer thickness for nanoscale multilayer structural devices
One click charging compensation
Equipped with a dual beam charge neutralization system, it can be independently controlled to turn on according to the actual needs of the sample.
Accurate charge neutralization applicable to all non-conductive samples and rough surfaces
Powerful Avantage analysis software
Fully digital instrument control
Visualization operation of system software
Complete XPS standard data library and compound structure identification database
Customize data collection to report generation mode
Thermo Fisher EscaLab Xi+X-ray photoelectron spectrometerEasy to operate:
● Highly automated
Analysis area and angle resolution are optional
Automated gas regulation and vacuum control
● Calibration at any time
Calibration of energy scales and instrument work functions
Ion gun positioning and ion beam focusing
● Mouse click sample navigation
Real time display of analysis location
High illumination intensity, adjustable intensity
Thermo Fisher EscaLab Xi+X-ray photoelectron spectrometerFlexible design
ISS, ARXPS, and REELS are standard configurations
The multifunctional sampling room is a standard configuration
● UPS and EDS/AES/SEM/SAM/optional
● Optional sample pretreatment attachments, including:
Sample preparation table, crystal cleaner, sample scraper
Sample heating/cooling device
Sputtering cleaning ion gun
evaporator
High pressure reaction chamber