Swiss VAT butterfly control vacuum valve 61.3 series is a precision control valve designed for high vacuum environments, with fast and accurate operation
Swiss VAT butterfly control vacuum valve 61.3 series fast and precise
The Swiss VAT high vacuum butterfly control valve 61.3 series is a precision control valve designed for high vacuum environments. The following is a detailed introduction to it1：
Product Features：
Precise pressure controlEquipped with a fast and precise motion controller, it can respond within 0.1 seconds and quickly and accurately control downstream pressure, making it an ideal solution for fine control in processes such as chemical vapor deposition (CVD) and atomic layer deposition (ALD).
Adapt to harsh environmentsSpecially designed for harsh downstream processes containing particles in the airflow, it can maintain full operation even under high particle loads and debris accumulation.
high reliabilityThis series of valves has been installed in thousands of demanding applications and has been validated under various process conditions, demonstrating excellent reliability. Its design is sturdy, provides direct installation options, and is easy to maintain, which can reduce operating costs.
Strong flexibilityProvide multiple design options, including different valve body materials, surface treatments, elastomers, flange connections, special sizes, and special control algorithms (adaptive, fixed PI downstream/soft pump), for easy integration into various vacuum applications.
technical parameters：
sizeprovide DN 25（1’’）、DN 40（1½’’）、DN 50（2’’）、DN 63（2½'）、DN 80（3'）、DN 100（4'）、DN 160（6'）、DN 200（8'）、DN 250（10'）、DN 320（12'） Waiting for multiple specifications.
Valve body materialThere are two materials to choose from: aluminum and stainless steel.
flange connectionThe standard flanges are ISO-KF and ISO-F, and specific flanges can also be provided according to customer needs.
pressure rangeThe working pressure range is from 1 × 10 ⁻⁸ mbar to 1.2 bar (absolute pressure).
leakage rateThe leakage rate of both aluminum and stainless steel valve bodies is less than 1 × 10 ⁻⁹ mbar · l ・ s ⁻¹.
service lifeIn pressure control mode, the number of cycles before the first maintenance can reach 2 million times.
temperature rangeThe valve body temperature is ≤ 150 ° C, and the maximum temperature of the controller is 50 ° C (recommended ≤ 35 ° C).
Swiss VAT butterfly control vacuum valve 61.3 series fast and precise
