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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
Single pole series ESC DC power supply
NegotiableUpdate on 01/07
- Model
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- Place of Origin
Overview
ESC DC Power, also known as ESC DC Power, is a DC high-voltage electrostatic power supply specifically designed for electrostatic chucks (ESC). This product is a single pole output power supply that can provide both positive and negative DC voltages simultaneously. It is connected to the DC electrode of the electrostatic chuck through a dedicated cable and filtering circuit, providing the electrostatic chuck with a DC high-voltage that generates suction force.
Product Details
innovation points
Capable of polarity reversal and discharge function
Can achieve polarity reversal function of unipolar/bipolar output voltage; Built in automatic discharge circuit, which can quickly and safely release the remaining charge on the electrostatic chuck.
Capable of monitoring function
It can achieve the monitoring function of output voltage and output current, and can provide real-time feedback through analog or digital signals to ensure that specific process requirements are met.
Equipped with output protection mechanism
Equipped with overvoltage protection, the output is turned off when the output voltage exceeds the set value by 10%; It has overcurrent protection and can set a current limit value through the control terminal. When the output current exceeds the set value by 10%, the output will be turned off.
Application field
Semiconductor - Integrated Circuit
Semiconductor - Packaging
Semiconductor display
Semiconductor lighting
technical indicators
| model | BE0400 |
| power input | 24VDC，1A； |
| output voltage | Single pole 4000Vdc |
| output current | 0~10：0~2mA max |
| Linear error of output voltage | 30Vdc~+4000Vdc， Within 1% -30Vdc~-4000VDC, within 1% |
| contact method | Manual, 25 pin I/O, RS232 |
| CT(Center-Tap) | none |
| HV Ground isolation | ＞10M |
| Input/output isolation | ＞500M |
| polarity inversion | support |
| Discharge function | When discharging, the resistance of HV+or HV - terminal to ground is 200k Ω± 5% |
| protection mechanism | Overvoltage protection can set current limit values |
