SU1510

Standard specifications

(1) Basicspecifications

SE image resolution : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)
15 nm at 3 kV ( x30,000, WD = 5 mm, High Vacuum Mode)

BSE image resolution : 4.0 nm at 30 kV ( x60,000, WD = 5 mm, 6 Pa in Low Vacuum Mode )

Magnification : ´5–´300,000
(Highest and lowest magnifications are dependent upon accelerating voltage, WDand scan speed)

(2) ElectronOptics

Electron beam source : Pre-centered Cartridge filament ( Tungsten hair-pin filament)

Accelerating voltage : 0.3 kV – 30 kV

Gun bias :Quadrant Bias

Beam alignment : 2-stage electromagnetic deflection (works as beam blankingwhen an image is freezed)

Lens system :3-stage electromagnetic lens reduction optics

Stigmator :X-Y octopole electromagnetic

Scanning coil : 2-stage electromagnetic deflection

Objective movable aperture: 4 holes withclick-stop design (30, 50, 80, 150 µm dia.)

Image shift :±50 µm or larger at WD = 15 mm

Analysis position : WD = 15 mm, TOA = 35°

Detectors :SE detector in High vacuum mode
BSE detector in high and low vacuum modes

(3) Specimenstage

(4) Evacuationsystem

Evacuation control : Fully automatic sequence with motor valves

Vacuum gauge : Pirani gauge

Ultimate vacuum : 1.5 x 10^-3Pa

Adjustable pressure range: 6 – 270 Pa (inlow vacuum mode only)

Vacuum pump :Turbo Molecular Pump(TMP) 210l/s,´1 Oil Rotary Pump 135 l/min.(50Hz), 162 l/min.(60Hz),´1

(5) Display

Control :Graphic User Interface(GUI), English menu

OS :Microsoft^®Windows^®XP Professional

Operation :Mouse/Keyboard, Rotary knob set(option)

Monitor :19 type LCD (1280´1024 pixels on desk top)

Image display mode : Full screen display (1280 ´960 pixels)
Standard display (640´480 pixels)
Dual image display (640 ´480 pixels´2), Signal mixing

Scanning mode : TV/FAST

:Slow

:Reduced area (320´240 pixels)

:Waveform

:Split screen/Dual magnification

:High definition image capture (max. 2560 ´1920 pixels)

:Frame integration image capture (max. 2560 ´1920 pixels)

Scanning speed : TV scan
(640´480 pixels, 25/30* frames/sec.)

:FAST scan
(full screen display: 6.3/7.5* frames/sec.)

:Slow scan
(full screen display: 1, 4, 20/16, 40/32, 80/64* sec./frame)
(640´480 pixels: 0.5, 2, 10/8, 20/16, 40/32*sec./frame)

:Reduced area scan
(320´240 pixels: 25/30,3/4* frame/sec.)
* Frequency of power supply: 50/60Hz

Automatic adjustment functions

:Automatic Brightness & Contrast (ABCC)

:Automatic Focus Control (AFC)

:Automatic Stigmator & Focus (ASF)

:Automatic Filament Saturation (AFS)

:Automatic Beam Alignment (ABA)

:Automatic Beam Setting (ABS)
(AFS + ABA + Automatic Gun Bias)

Signal and image processing functions

:Improving S/N ratio by averaging (TV, FAST scan)

:Improving S/N ratio by pixel integration

:Improving S/N ratio by frame integration
(maximum frames for integration: 1024)(TV, FAST, SLOW1)

:Composite bi-color image display
(Real time on dual image display mode/Save image)

:Pseudo color display(Save image)

:Real time image processing
(Reversed contrast, Gamma control)

:Real time histogram display

:Image processing for save image
(Reversed contrast, Gamma control, Smoothing, Edge enhancement, etc.)

Image saving : Image saving size
(640´480 pixels, 1280 ´960 pixels, 2560´1920 pixels, 5120´3840 pixels)

:Image filing format: BMP, TIFF, JPEG

Image print out : Free layout print function in standard

Management of save image

:SEM data manager (Image data base) in standard
(Data management, Thumbnail display, various image processing functions)

Other functions : Beam blanking when an image is frozen.

:Raster rotation

:Dynamic focus/Tilt compensation

:Data display (Image number, Accelerating voltage, Magnification, Micron marker,Unit, WD, Date, Time, Pressure, Detector)
Data display selectable between with and without image

:Data entry［Figures (circle, rectangular, arrow, measurement line),characters］

:Easy measurement function (distance between 2 points, and measurement lineswith arrow)

:3D Animation Maintenance Guide

:Image transfer to Quartz Imaging PCI

X-Ray mode function : Input signal terminals for X-Ray Rate-meter(0 - +10V) andMapping(TTL)

:Scanning mode (Line analysis, Spot analysis, Average concentration analysis)

:DBC interface (option)

Connection port for external equipment

:USB interface

:Network interface (Ethernet), Setting up is at option.

VTR signal :NTSC black and white signal only(BNC), an image in standard display mode only.

(6) Safety device

:Protected against power failure, leakage current and vacuum failure.

(7) Dimensionand weight