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Regulus series (ultra-high resolution field emission scanning electron microscope)

NegotiableUpdate on 07/29
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Overview

Ultra high resolution field emission scanning electron microscope Regulus series. The existing models of Regulus series, SU8240, SU8230, SU8220 and SU8010, have been reorganized into Regulus 8240, Regulus 8230, Regulus 8220, Re

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Regulus系列 (超高分辨场发射扫描电子显微镜)

Regulus series ultra-high resolution field emission scanning electron microscope


Regulus系列 (超高分辨场发射扫描电子显微镜)

Regulus series

The existing models SU8240, SU8230, SU8220, and SU8010 have been reorganized to form Regulus 8240, Regulus 8230, Regulus 8220, and Regulus 8100

The "Regulus series" inherits the observation and analysis performance of existing models, equipped with the low-noise cold field emission electron gun * 1 of the SU8200 series, which can obtain highly stable beam current.

By optimizing the electronic optical system, the resolution of Regulus 8240/8230/8220 has been increased to 0.9 nm under 1 kV conditions, and the resolution of Regulus 8100 has been increased to 1.1 nm. The observation performance has been improved by about 20% compared to existing models.

In addition, to fully utilize the ultra-high resolution capability, the magnification has also been increased from 1 million times in the past to 2 million times * 1.
Regulus 8240/8230/8220/8100 also has improved user support functions, which make it easier for users to understand the detection principles of various complex signals and help them fully utilize the good performance of the instrument.

*1

Regulus 8240/8230/8220 only



characteristic

  • Using the "SU8200 series" cold field emission electron gun * 2

  • Using the high brightness stable region that appears after flashing with an electron beam as the stable observation interval, enables good performance in high-resolution observation and analysis under low acceleration voltage conditions

  • Compared to existing models, the resolution has increased by about 20%
    (Regulus8240/8230/8220: 0.9 nm/1 kV、Regulus8100: 1.1 nm/1 kV)

  • Adopting a low pollution, high vacuum sample chamber

  • By using an energy filter (optional), multiple component contrasts can be observed * 2

High resolution observation under extremely low landing voltage

Regulus系列 (超高分辨场发射扫描电子显微镜)

Sample: Gold particles
Landing voltage: 10 V

Ultra-high resolution observation

Regulus系列 (超高分辨场发射扫描电子显微镜)

Sample: Pt catalyst
Acceleration voltage: 30 kV

High resolution EDX analysis under low acceleration voltage

Regulus系列 (超高分辨场发射扫描电子显微镜)

Sample: Sn ball
Landing voltage: 1.5 kV

*2Regulus 8240/8230/8220 only


Regulus系列 (超高分辨场发射扫描电子显微镜)Regulus系列 (超高分辨场发射扫描电子显微镜)



specifications

Regulus系列 (超高分辨场发射扫描电子显微镜)


*3Observation in deceleration mode

*4Magnification based on 127mm × 95mm film

Regulus SEM Layout

Regulus系列 (超高分辨场发射扫描电子显微镜)