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Kegonas Instrument Trading (Shanghai) Co., Ltd
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RTP fast annealing furnace

NegotiableUpdate on 05/06
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Overview

RTP rapid annealing furnace has become an important annealing technology in the semiconductor, ferroelectric, and coating industries. However, currently only large and expensive production equipment can complete rapid heat treatment, which greatly reduces the efficiency of research and development work (especially for small samples). In order to meet market demand, ADVANCE RIKO has developed the MILA-5000 series of small rapid annealing furnaces. This series of equipment includes an infrared gold reflector furnace and a high-precision temperature controller. Select corresponding pumps and gas interfaces according to requirements, MILA can provide the same heat treatment performance as large RTP equipment.

Product Details

RTP fast annealing furnaceFeatures:

Rapid heating and cooling capability;

Can be used in any atmosphere;

Real time observation of samples;

Accurate temperature control;

RTP fast annealing furnaceTechnical Specifications:

model

MILA-5000Series

Temperature range:

Room temperature~1200 ℃ (highest)

Maximum heating power:

50 ℃/s (50~1200 ℃) vacuum

45 ℃/s (50~1200 ℃) nitrogen atmosphere

Temperature uniformity:

± 2.0 ℃ (Δ T=4 ℃) 1200 ℃ vacuum

± 4.5 ℃ (Δ T=9 ℃) 1200 ℃ nitrogen atmosphere

Heating atmosphere:

Under atmospheric, vacuum, and inert atmosphere conditions

Sample size:

MAX:50 square or φ 50 x T5 (mm)

Program module:

Temperature vs. time setting, 256 steps, 32 programs (the largest);

PID+Fuzzy control, automatic fine-tuning, USB communication, automatic/manual switching;

Kegonas Instrument Trading (Shanghai) Co., Ltd. is a vibrant instrument trading company established with investment from Sweden's Hot Disk Co., Ltd. It enjoys a good reputation in the market. For nearly 20 years since its establishment, the company has been committed to becoming a system supplier for thermal properties equipment. Its main business is to develop, manufacture, and sell Swedish Hot Disk brand thermal constant analyzers in China and some neighboring countries.