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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
PC300 pressure controller
NegotiableUpdate on 01/07
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Overview
The PC300 pressure controller is a pressure controller with complete flow meter function, mainly used in the semiconductor field, such as in wafer backside cooling systems, to control the pressure of cooling gases on the backside of silicon wafers, such as helium, nitrogen, argon and other special gases.
Product Details
innovation points
Fully digitized product
The product adopts a microprocessor, which has the advantages of high intelligence, high reliability, and easy maintenance.
Dual control technology
The product adopts dual control technology, which can achieve high response and high precision performance indicators.
Application field
Semiconductor - Integrated Circuit
Semiconductor - Packaging
Semiconductor display
Semiconductor lighting
Semiconductor Micro Electro Mechanical Systems
Power Semiconductor
Compound semiconductor
technical indicators
| model | PC300 |
| Full scale flow rate | (10 20 50 100 200 500 5000)SCCM |
| Full range pressure | (10 20 50 100)Torr |
| Control method | Downstream |
| Pressure control accuracy | ±0.2% of F.S. |
| Control repeatability | ±0.2% of F.S. |
| response time | <1.0 Second |
| Working temperature range | 10℃ to 50℃ |
| Valve type | Normally Closed |
| leak rate | <1x10-12(SCC/SEC He) |
