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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Beijing Huacheng Electronics Co., Ltd
zhaoqiannan@sevenstar.com.cn
18610520676
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
innovation points
Support dual power wide range power supply
Four combinations of simulated voltage
Upstream and downstream pressure control
Application field
Semiconductor - Integrated Circuit
Semiconductor - Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
technical indicators
| model | PC210 |
| pressure type | Absolute pressure |
| Control the full range of pressure | Absolute pressure: 100Torr, 200Torr, 1000Torr; 300Kpa |
| pressure resistance | 3MPa |
| Full range flow rate of valve port | 200SCCM; 1、2、4、5、10、20SLM |
| Control method | Upstream and downstream |
| temperature coefficient | Zero: ±0.04% of F.s./℃; Span: ±0.04% of Reading/℃ |
| Pressure resolution | 0.1 Torr |
| Pressure control accuracy | ±0.5% of Reading |
| Working temperature range | 10℃~50℃ |
| mechanical interface | VCR 1/4 'male connector, VCR 1/2' male connector |
| Valve type | normally closed |
| leakage | <1x10-9(scc/sec He) |
| internal leakage | <1.0% of the valve port full-scale flow rate or the larger of 1sccm (1 atmosphere N2) |
| power supply | ±15VDC |
| electrical interface | DB-15 needle |
Note:
Gas pressure controllers usually use nitrogen (N) when leaving the factory2)Calibration
The unit of gas pressure is specified as Torr; Mbar (millibars); KPa (kilopascals)
The standard state is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg)
In Huacheng Electronic PC products, the unit SCCM is equivalent to "mL/min, 0 ° C, 1atm", and the unit SLM is equivalent to "L/min, 0 ° C, 1atm"
F. S. (Full Scale): Full scale value; S. P. (Set Point): Set point value