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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
PC200 pressure controller
NegotiableUpdate on 01/07
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Overview
The PC200 pressure controller is used for precise control and measurement of gas pressure. Mainly used in fields such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.
Product Details
innovation points
Support dual power wide range power supply
Powered by ± 15VDC, dual power supply with wide range, low current, and low power consumption.
Four combinations of simulated voltage
There are four combinations of analog voltage input and output to choose from.
Upstream and downstream pressure control
Both upstream and downstream can achieve pressure control. By changing the flow direction of the channel and adjusting the upstream and downstream control parameters through software, the pressure control mode can be switched.
Application field
Semiconductor - Integrated Circuit
Semiconductor - Display
Life Sciences - Analytical Instruments
Scientific Research - Experimental Equipment
technical indicators
| model | PC200 |
| pressure type | Absolute pressure, gauge pressure |
| Control the full range of pressure | Absolute pressure: 1000Torr, 2000Torr; 300Kpa, 3000mbar gauge pressure: 500Kpa |
| pressure resistance | 3MPa |
| Full range flow rate of valve port | 200sccm; 1、2、4、5、10、15、50SLM |
| Control method | Upstream and downstream |
| temperature coefficient | Zero: ±0.02% of F.s./℃； Span: ±0.04% of Reading/℃ |
| Pressure resolution | 0.1 Torr |
| Pressure control accuracy | ±0.5% of F.S. |
| response time | <1.0 S |
| Working temperature range | 5℃~50℃ |
| mechanical interface | VCR1/4 'male connector, VCR3/8' male connector |
| Valve type | Normally closed, normally open |
| leakage | <5x10-12(Pa.m3/s He) |
| internal leakage | <1.0% of full-scale flow rate at valve port (when the valve is closed, the inlet end is 25PSI and the outlet end is atmospheric) |
| power supply | +15~+24VDC (single-stage), ± 15VDC (bipolar, only supports DB-9 pin interface) |
| electrical interface | DeviceNet connector, DB-9 pin, EtherCAT connector |
Note:
Gas pressure controllers usually use nitrogen (N) when leaving the factory2）Calibration.
The unit of gas pressure is specified as Torr; Mbar (millibars); KPa (kilopascals);
The standard state is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg)
In Huacheng Electronic PC products, the unit SCCM is equivalent to "mL/min, 0 ° C, 1atm", and the unit SLM is equivalent to "L/min, 0 ° C, 1atm".
F. S. (Full Scale): Full scale value; S. P. (Set Point): Set point value
