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E-mail
zhaoqiannan@sevenstar.com.cn
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Phone
18610520676
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Address
No.13 Jingyuan Street, Beijing Economic and Technological Development Zone
Product Categories
Beijing Huacheng Electronics Co., Ltd
PC100 pressure controller
NegotiableUpdate on 01/07
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Overview
PC100 pressure controller is a digital pressure control product that provides high accuracy and reliability for gas pressure control and measurement. Can support both digital signals and 0-5V analog signals simultaneously, powered by a single power supply. In addition, standard open communication protocols can provide convenience for customers to develop their own control and data collection software.
Product Details
innovation points
Pressure sensing technology based on PTS
On the one hand, by optimizing the pressure and temperature parameters, a pressure temperature data template is established to calculate the compensation coefficient table for temperature compensation; On the other hand, by improving the installation position of the sensor and reducing the volume of the detection cavity, the sensor signal measurement can be more accurate and the pressure can be precisely controlled.
AI based pressure control technology
By establishing a pressure fluctuation data model, quickly identify patterns such as fixed flow rate pressure fluctuations and fixed pressure flow rate fluctuations. By using pre increasing or decreasing valve voltage according to different modes for pressure PID regulation, this strategy has the characteristics of fast response speed and stable control.
All metal corrosion-resistant technology
Adopting embedded fluorine lined proportional pressure regulating valve technology. The valve sealing structure mainly adopts 316L stainless steel and PTFE material. PTFE material can improve the service life of products, suitable for various types of corrosive gases, and has better sealing performance than metal seals.
Application field
Semiconductor - Display
Semiconductor - Integrated Circuit
Semiconductor - Lighting
Clean Energy - Photovoltaic
technical indicators
| model | PC100 |
| pressure type | Absolute pressure |
| Control the full range of pressure | 1000Torr、1200mbar |
| pressure resistance | 3MPa |
| Full range flow rate of valve port | 50、500sccm; 1、2、3、5SLM |
| Control method | upstream |
| temperature coefficient | Zero:±0.02% of F.s./℃； Span: ±0.04% of Reading/℃ |
| Pressure resolution | 0.1 Torr |
| Pressure control accuracy | ±1.0% of Reading (≥10%FS); ±0.2% of F.S.(<10%FS ) |
| response time | <1.0 S |
| Working temperature range | 10℃~50℃ |
| mechanical interface | Dual card sleeve 1/4 ', VCR 1/4 "male connector |
| Valve type | normally closed |
| leakage | <1x10-10(scc/sec He) |
| internal leakage | <1.0% of full-scale flow rate at valve port (when the valve is closed, the inlet end is 25 PSI and the outlet end is atmospheric) |
| power supply | +15 ~ +24 VDC(<4 watts) |
| electrical interface | DB-9 pin, EtherCAT connector |
Note:
Gas pressure controllers usually use nitrogen (N) when leaving the factory2）Calibration.
The unit of gas pressure is specified as Torr; Mbar (millibars)
The standard state is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg)
In Huacheng Electronic PC products, the unit SCCM is equivalent to "mL/min, 0 ° C, 1atm", and the unit SLM is equivalent to "L/min, 0 ° C, 1atm".
F. S. (Full Scale): Full scale value; S. P. (Set Point): Set point value
