Optical profilometer for large-sized samples

feature

Fearless of weight restrictions-Infinite measurement capability

600 x 600mmWide range of movement, per secondAmazing speed of 1 meter. Closed loop XY gantry design, not afraid of weight limitations, with consistent performance.

Use with confidence

Certified for semiconductor characterization，The system has been carefully designed to comply with multiple industry standards such as SEMI S2 and S8, and has passed the German Rheinland certificationTÜVauthentication.

Three in one technology

Ultra high measurement universality,Dust free measuring headS neox CleanroomProvide three different optical techniques that can be used to image each specific sample using the appropriate technique, achieving sub nanometer level accuracy.

Strictly comply withISO Level 1

Suitable for dust-free rooms,The measuring sensor meets the requirementsISO Level 1 standard. The body is made of stainless steel, which can reduce particle emissions.

software

Built in collection software：Integrated software solution

This measurement system is composed of user-friendly componentsSensoSCAN control provides more and more powerful functions for measurement automation.

SensoPRO-Rapid Quality Control

A plugin based solution,SensoPRO has a large number of plugins that can meet common automation analysis needs and customized applications.

Tailored solutions for consumer electronics products

SensoPRO software can achieve automated analysis and efficient processing of large amounts of data in quality control. We offer a range of customized plugins to meet the special requirements of the consumer electronics industry.

SensoVIEW-Powerful analysis software

Expand the analytical perspective,SensoVIEW is an ideal analysis software suitable for various tasks. It has a complete toolkit that can extract data from 2D and 3D datasets.

surface analysis

SensoVIEW provides a user-friendly step-by-step interface for specialized operators to extract flatness and surface texture parameters, perform volume calculations, and more according to the corresponding ISO standards.

dimensional measurement

There are multiple tools available for critical dimension analysis of contour and profile drawings. Each tool is equipped with automatic adjustment function and can incorporate tolerances to ensure comprehensive dimensional analysis.

Specifications

technology

照明光源

Size（mm/'）

objective lens-Mingchang

Objective Lens - Interference

PSI/ePSI/CSI

gantry typeXY platform

Standard Certification