Microscopic spectroscopic film thickness gauge

Microscopic spectroscopic film thickness gauge

Microscopic spectroscopic film thickness gauge

Non contact, non-destructive, microscopic, focusing, and measurement can be completed in 1 second. The OPTM series microscopic spectrometer film thickness gauge is a new high-precision and cost-effective spectrometer film thickness gauge that can replace ellipsometers to test film thickness, refractive index n, extinction coefficient k, and absolute reflectivity. Suitable for testing various transparent film layers, and capable of removing back reflections on transparent substrates to achieve the goal of "true reflectivity and film thickness" testing. In addition, the software is easy to operate, user-friendly, and simplifies complex modeling processes.

Non contact and non-destructive, the measuring head can be freely integrated into the customer's system

Beginners can easily analyze the beginner analysis mode of modeling

High precision and high reproducibility measurement of absolute reflectance in the ultraviolet to near-infrared wavelength range, capable of analyzing multi-layer film thickness and optical constants (n: refractive index, k: extinction coefficient)

Single point focusing and measurement can be completed within 1 second

A wide range optical system (UV~NIR) under microscopic spectroscopy

● Independent testing head corresponds to various inline customization requirements

The minimum corresponding spot is about 3 μ m

Measurement project

● Absolute reflectance analysis

Multi layer film analysis (50 layers)

Optical constants (n: refractive index, k: extinction coefficient)

Transparent substrate samples such as films or glass cannot be measured correctly due to the influence of internal reflection of the substrate. The OPTM series uses an objective lens that can physically remove internal reflections, allowing for high-precision measurements even on transparent substrates. In addition, for films or SiC samples with optical anisotropy, they can also be measured separately without being affected by them.

(No. 5172203)

Scope of application

Semiconductor, composite semiconductor: silicon semiconductor, silicon carbide semiconductor, gallium arsenide semiconductor, photoresist, dielectric constant material

FPD: LCD, TFT, OLED (organic EL)

Data storage: DVD, magnetic head film, magnetic materials

Optical materials: filters, anti reflective films

Flat panel displays: LCD displays, thin-film transistors OLED

● Thin films: AR film, HC film, PET film, etc

Other: building materials, adhesives, DLC, etc

Proxy brands: CCS Clear Writing Speed SEN Risen, EYE Iwasaki, REVOX Leybold, SeriC Sorek

SONIC, SANKO, NEWKON, NPM, SUGIYAMA, Sugiyama

NS Japan Science, DRY-CABI Toshimitsu, TOKISANGYO Dongji, SIBATA Shibata

Advantageous Brands: USHIO Niuwei, TOPCON Topcon, FUNATECH Chuanyue Long, ORC Ouasi, HAYASHI Lin Timepiece

SAGADEN Saga, SAKAZUME Sakakiri, DNP Great Japan Scientific Research, TOKYO DENSHOKU Electrochrome KKIMAC

S-VANS Swans, ORIHARA Shingen, LUCEO Lujiou, HIKARIYA Mitsuya, YAMADA Yamada Optics

AND Ainde, T&D Tiante, JIKCO Jigao, DKK-TOA East Asia Radio, OKANO Okano

IMV Aimuwei, MITUTOYO Sanfeng, KYOWA Gonghe, ONOSOKKI Ono, SANEI Sanrong

HEIDON Xindong, KURABO Cangfang, SHOWA Showa, THINKY Xinji