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E-mail
info@megphy.com
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Phone
17706131531
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Address
6F-13, Building B, Tengfei Xinsu Industrial Park, No. 5 Xinghan Street, Suzhou Industrial Park
Suzhou Mangofei Instrument Co., Ltd
info@megphy.com
17706131531
6F-13, Building B, Tengfei Xinsu Industrial Park, No. 5 Xinghan Street, Suzhou Industrial Park
FlexSEM1000 is a compact and high-performance tungsten filament electron microscope recently launched by Hitachi High Tech. It features a large beam current and low aberration objective lens and condenser design, as well as a high-resolution secondary electron probe and a high-sensitivity five segment backscatter probe. It has excellent low vacuum imaging energy and adopts the latest SEM MAP high-precision navigation system and the latest and most comprehensive automation functions, making its performance superior and usage easier.
| Resolution | 4.0nm (acceleration voltage 20kV, high vacuum mode, secondary electron image) |
| 15.0nm (acceleration voltage 1kV, high vacuum mode, secondary electrons) | |
| 5.0nm (acceleration voltage 20kV, low vacuum mode, backscattered electron image) |
| magnification | Film magnification: 6-3000000x |
| Display magnification: 16-800000x |
| Acceleration voltage | 0.3-20kV |
| Low vacuum variable pressure range | 6-100Pa |
| Madatai | Standard three-axis automatic motor |
| itinerary | X: 0-40mm |
| Y: 0-50mm | |
| R: 360 ° | |
| Z: 5-15mm | |
| T: -15- 90° | |
| Electronic optical system | Electron gun: pre aligned tungsten filament |
| Signal detection system: secondary electronic detector; High sensitivity backscatter detector |
| vacuum system | Fully automatic valve controlled vacuum pumping system/turbo molecular pump: 1 set of 61L/S |
| Mechanical pump: 1 unit at 100L/min | |
| Safety device: vacuum protection function with power outage and leakage protection | |
| Operation assistance function | Electron beam rotation; Dynamic focus; Image quality optimization function |
| Data input; Measurement between 2 points, angle measurement, and text; Preset magnification; | |
| Sample table position navigation function (SEM MAP); Electron beam marking |