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E-mail
lihuizhi@accu-flow.com.cn
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Phone
15010116300
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Address
Building B, Ruichuang International Center, No. 8 Wangjing East Road, Chaoyang District, Beijing
Beijing Jingliang Technology Co., Ltd
lihuizhi@accu-flow.com.cn
15010116300
Building B, Ruichuang International Center, No. 8 Wangjing East Road, Chaoyang District, Beijing
1Product Overview:High temperature split gas flow controller and flowmeter for sedimentation equipment
uCan quickly and accurately measure the volumetric flow rate of high-temperature gases/mass flow rate
uUsing customized high-speed proportional control valves to regulate the volume flow rate of the medium/Precise control of quality flow rate
uLarge tactile display screen, easy to operate and open for analog input and outputRS-485Digital Communication
uThere are no movable components or thermal elements inside, and it has passed anti vibration testing and is not sensitive to installation direction
uAdopting internal compensation laminar pressure difference technology, the fluid maintains laminar motion over a large flow range
uprovideUser support, including technical consultation, fast equipment calibration services, and conditional lifetime warranty.
2、 Product application:
--It has been widely used in the field of deposition technology, such as ceramic technology, semiconductor, optical fiber and other industries that use high-temperature gas deposition equipment.
--Multi variable measurement and 50:1 adjustable range ratio enable the use of only one thermal high-temperature split gas mass flow controller and flowmeter to replace the effectiveness of multiple devices.
--precision0.5%FSRepeatability0.5%Unable to reach200Millisecond control response time ensures smooth operation of high-temperature process gases.
IIITechnical Specifications:High temperature split gas flow controller and flowmeter for sedimentation equipment
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Technology indicator |
Mass flow controller |
mass flow meter |
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measurement range |
2SCCM~300SLM |
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precision (Under standard conditions after zeroing) |
±0.5%F·S(Full scale) |
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repeatability accuracy |
±0.5%F·S |
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Flow control ratio /measurement range |
2%~100%F·S/50:1 |
1%~100%F·S/100:1 |
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Operating Temperature |
Overcurrent section:(90~150℃), control part:0~70℃ |
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leak rate |
<2×10-9 Pa m³/S |
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Mechanics Components |
Maximum work pressure |
3 MPa / 10MPa |
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Sealing material |
Fluororubber, perfluoroether, metal seal |
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Protection level |
IP40 |
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Base material |
stainless steel |
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Air circuit connector |
φ6,φ8,φ10,φ12, card sleeveVCRwait |
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electric performance |
monochromeLCDdisplay screen |
Simultaneously display real-time traffic and set traffic |
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Digital Communication |
Optional:RS232/485,ModbusAgreementProfibusAgreementDeviceNetagreement |
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Simulate input and output signals |
0~5VDC/4~20mA |
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Electrical signal interface |
B9Kong, RJ11, 5.5×2.1Quick power plug |
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power supply voltage |
±15VDC,24VDC |
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