High pressure mass flow controller

1High pressure mass flow controllerDesign features

Thermal principle
integrated design
Full range from5SCCMto1000SLPM
Response time not exceeding 2 second
The operating pressure can reach20.7MPa
Not sensitive to installation location
316SSMaterial, allowing measurement of corrosive gases
No installation requirements for straight pipe sections
single power supply

IIHigh pressure mass flow controllerTechnical Specifications
Flow range: from0-5SCCMto0-1000SLPM N 2Please refer to Table 1 for details
Response time: 1 ～ 2 second
Accuracy: ±1%Full range (excluding204AType)
---------± 1± 1.5%.Full range（204AType)
Repeatability: ±0.2%full scale
Range ratio:50:1（2%-100%Full scale)
Environment and operating temperature: -10 ～ 70 ℃
High operating pressure:3000PSIG（20.7MPa）Please refer to the materials for details

Zero drift: ±0.05 %full scale/℃
Range drift: ±0.05 %reading/℃
Pressure drift:0.1%/atm(Compared toN 2）
Installation direction: insensitive to position
Preheating time: 10 minute
Electrical connection: card type（ 20 Needle) orDType（ 9 Needle)
Set point input flow signal output:0-5VDC/0-5VDC；4-20mA/4-20mA

Power supply:
Voltage output:+12(± 5 ％)(Only applicable to)0-5VDCand1-5VDCTraffic signal output) or15(± 10 ％)VDC
Current output:+15(± 5 ％)or24(± 15 ％)VDC
Current consumption:<250mAdc
Weight: Please refer to Table 1

3、 Structural material

Subject:316SS
Sensor components:316LSS
Hole:316SS
Valve components (liquid connection):
302SS，316SS，430FSS，Sandvik? 1802(Except 202 、 221 、 222 and 251 Type);302SS，316SS，Sandvik? 1802（ 202 、 221 、 222 and 251 Type)
Sealing materialO”Ring and valve seat):
Source N，EPDM，Kalrez，Neoprene，Viton(Except202AThe203Aand204AType);Source N，Viton（202AThe203Aand204AType)
Process connection:316SS

4、 Selection Table