Welcome Customer !

Membership

Help

Hefei Zhongguang Electronic Technology Co., Ltd
Custom manufacturer

Main Products:

instrumentb2b>Products

Hefei Zhongguang Electronic Technology Co., Ltd

  • E-mail

    317399383@qq.com

  • Phone

    15955179814

  • Address

    No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province

Contact Now

HMDS Adhesive Coating Machine

NegotiableUpdate on 02/09
Model
Nature of the Manufacturer
Producers
Product Category
Place of Origin
Overview
The HMDS thickening coating machine is used to uniformly coat a layer of HMDS (hexamethyldisilazane) on the surface of silicon wafers and other substrates before uniform coating. Function: Reduce the contact angle of HMDS treated silicon wafers, thereby reducing the difficulty of spreading photoresist on the surface of silicon wafers during uniform coating, improving the adhesion between photoresist and silicon wafers, and reducing the amount of photoresist used.
Product Details

HMDS Adhesive Coating MachineMain technical indicators:

1Studio Capacity: 250×250×250mm (W×D×H);

2Material of the cavity:SUS316;

3Outer frame material:Q235A, Surface spraying treatment;

4Workpiece placement:2nd floor;

5Heating method: Heating the lower part and both sides of the chamber, with an external heater;

6Studio temperature range: normal temperature~ +200℃ ;

7Temperature resolution:0.1℃;

8Temperature fluctuation:±0.5℃;

9Cooling method: Natural cooling along with the furnace

10真空度:133Pa, reaching the vacuum time10min

11Liquid medicine container:1 group, container material: high borosilicate glass;

12electricity Source:220V\\50±0.5Hz;

13merit Rate: 3kw

HMDS Adhesive Coating Machinebox structure:

1 Structural form: Integral square stainless steel inner liner structure, consisting ofcavityComposed of partial, vacuum system, and electrical control system. The electrical control system is located in the boxtopEasy to operate and secure.

The pressure bearing method of the test chamber working room is internal pressure bearing method,Using high-quality stainless steel plates as the pressure bearing box body(i.e. studio), ensuring cooling rate and temperature sensitivity, and ensuring good temperature uniformity in the studio under low-pressure conditions. Install the casing outside the studio,Fill ceramic fiber insulation materialEnhance insulation performance and ensure the overall performance of the test chamber; Inside the cavity, there are2nd floorshelf board.

2. Inner wall material of the box: stainless steel plate (SUS316);

3. Sealing of furnace door: The sealing of furnace door adopts customized skirt edge silicone rubber sealing strip;

4. The inner and outer walls of the studio are welded with reinforcing ribs;

5. Installed at the bottom of the boxlandFeet.

vacuum system

1. Vacuum pump:dry pump

2. Vacuum auxiliary components: The main vacuum auxiliary components are all imported high-quality components, such as pressure sensors and vacuum release solenoid valves

3. Work pressure: digital display.

HMDS fluid replacement system

1. SUS316 cover

2. High borosilicate carrier container

3. Liquid shortage alarm: floating ball level gauge

4. 1 medicine tank, 1 set of pipelines

Control system:

1. Temperature measurement: high-quality armored K-scale thermocouple;

2. Pressure measurement: The pressure sensor has a structure that is easy to replace and install;

3. Temperature and pressure control (interface diagram for reference only):

adopt7.0-inch color LCD touch controlled constant temperature and pressure programmable controller, equipped with RS232 or RS485 computer communication interface, can be connected to a computer to store and record historical data. The Chinese interface can directly display the set temperature and pressure, actual temperature and pressure deviation inside the box, system parameters, operating curve, heater working status, and initialization parameter password lock. It also has automatic operation of the test program and PID parameter self-tuning function. The programming of the running program adopts a human-machine dialogue mode, which can achieve the fully automatic operation function of the equipment;

Instrument features:

A. Equipped with temperature and humidity PID regulation and automatic parameter tuning function;

B. Using LCD display, multiple screens can be displayed (running screen, selection screen, running parameter setting screen, setting parameter setting screen, and program parameter setting screen);

C. The temperature is input using a K-scale thermocouple; Pressure data collection adopts pressure sensors;

D. Having rich arbitrary computing functions to achieve high-quality control;

4The control device adopts high-quality components such as Siemens and Schneider to ensure the reliability of control.

5. Equipped with over temperature protection sound and light alarm devices, as well as automatic power-off protection devices, to ensure safe operation of the equipment.

6. Heating control element:

Security protection measures

1. Safe and reliable grounding protection device;

2. Independent studio over temperature protection (temperature upper limit protection);

3. Heater short circuit and overload protection;

Equipment usage conditions

1. Power supply: AC220V ± 10% V, 50 Hz ± 2%, 3.2kva;

2. Operating environment temperature: 5-35 ℃

3. Environmental humidity: ≤ 85% R.H;

4. Air quality: No high concentration dust or corrosive gases.

tenoneMain Material List

Material Name

Specifications

Country of Production/Manufacturer

air supply treatment


JapanSMC

globe valve/Electromagnetic valve/filter/

several

Domestic high-quality products

Water pressure protector


Domestic high-quality products

filter


Domestic high-quality products

dry pump


Domestic high-quality products

pressure sensor


Domestic high-quality products